Search

Your search keyword '"Manchanda, L."' showing total 1 results

Refine your results

1 results on '"Manchanda, L."'

1. Growth temperature dependence of the Si(001)/SiO[sub 2] interface width.

Author

Mau-Tsu Tang, Evans-Lutterodt, K.W., Green, M.L., Brasen, D., Krisch, K., Manchanda, L., Higashi, G.S., and Boone, T.

Subjects
*INTERFACES (Physical sciences), *OXIDES, *OXIDATION, *THIN films
Abstract

Examines the growth temperature dependence of silicon/silica interface. Use of rapid thermal oxidation; Effects of temperature on interfacial roughness; Preference of growing thin oxide films at high temperatures.

Published
1994
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results