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A robust and practical force control system is crucial to the sensitive piezo-driven micromanipulation applications. This paper presents a new model-free robust finite-time force tracking controller for piezoelectric actuators (PEAs). The proposed controller composes of three intuitive terms: (1) a time-delay estimation (TDE) term that eliminates the requirement of detailed information about the PEA system, realizing model-free control; (2) a fast integral terminal sliding mode-based desired error dynamics injection term that ensures fast convergence and high tracking precision; (3) a correcting term based on adaptive fuzzy logic system that compensates for TDE errors caused by discontinuous nonlinearities and improves the robustness of the system. Force differential signal used in the controller is estimated online by a force state estimator. Stability of the closed-loop system and finite-time convergence are analyzed in theory. Comparative experiments are carried out on a PEA system with two superposed PEAs. Results show that the proposed control strategy has faster convergence, higher tracking accuracy and stronger robustness compared with the traditional TDE-based force controllers. [ABSTRACT FROM AUTHOR]

Improving the control performance of active vibration isolation systems is crucial to provide an ultra-quiet environment for precision instruments. This paper presents a new fractional-order robust model reference adaptive controller for the piezo-actuated active vibration isolation systems with a relative-degree-one model. One advantage of the proposed controller lies in that its controller parameters are adjusted online by fractional proportional–integral-type adaptive laws, which not only speeds up the convergence of the closed-loop system, but also improves the control energy efficiency. Moreover, the proposed controller only uses the measurable input and output of the plant as feedback signals, which is convenient for controller implementation. The stability of the closed-loop system is proved based on the Lyapunov theory in detail. The optimal values of the fractional order and adaptive gains for adaptive laws are determined using the multi-objective genetic algorithm through off-line simulation. Comparative experiments on the piezo-actuated active vibration isolation systems are conducted to verify the effectiveness of the proposed controller. Results show that the proposed controller achieves satisfactory isolation performance in a wider frequency band of 20–500 Hz, and simultaneously reduces the control effort compared with the traditional MRAC methods. [ABSTRACT FROM AUTHOR]