1. Microfabrication using elastomeric stamp deformation
- Author
-
Xiaojuan Fan, Tran, Dat T., Brennan, Daniel P., and Oliver, Scott R.J.
- Subjects
Monomolecular films -- Design and construction ,Elastomers -- Chemical properties ,Integrated circuit fabrication -- Methods ,Integrated circuit fabrication ,Chemicals, plastics and rubber industries - Abstract
Elastomeric stamp deformation was used to fabricate a series of new metal thin film patterns not present on the original stamp. The rounded patterns are of nanoscale thickness, long-range order, and are created from elastomeric stamps with only straight-edged features and the feature size, separation, relief height, stamp elasticity and external force control the morphology and appearance of shape.
- Published
- 2006