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Title: Preparation and characterization of silicon-based materials Author: Miroslav Šlechta Department: Department of Chemical Physics and Optics Supervisor: doc. RNDr. Juraj Dian, Csc., Department of Chemical Physics and Optics Abstract: Porous silicon is nanostructured material based on silicon. He was prepared by anodic etching of crystalline silicon in hydrofluoric acid. Physical and chemical properties of porous silicon nanocrystals resulting from the dimensions, which range from units to tens of nanometers. For nanostructured silicon compared to crystalline silicon, exhibit unique properties that depend on the degree of quantum dimensional phenomena and phenomena on its large internal surface. Suitable choice of the silicon substrate, particularly in terms of conductivity and crystallographic orientation, and technological conditions (in particular electrolyte composition, the etching time and current density) can be prepared nanostructured materials of different pore sizes - macroporous, mesoporous and microporous silicon and varying representation Si-O and Si-H bonds. Morphology and chemical composition of the surface of porous silicon allows to think of it as a suitable material for a range of applications - particularly chemical sensors and biosensors, optoelectronics and biomedical applications....