1. 声表面波器件光刻的衍射效应研究.
- Author
-
孟腾飞, 陈晓阳, 段英丽, 于海洋, 周培根, and 王永安
- Subjects
ACOUSTIC surface waves ,PHOTOLITHOGRAPHY ,PHOTORESISTS ,SAWS - Abstract
Copyright of Piezoelectrics & Acoustooptics is the property of Piezoelectric & Acoustooptic and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
- Published
- 2022
- Full Text
- View/download PDF