1. 用于E型薄膜制备的双掩膜工艺研究.
- Author
-
郝一鸣, 雷 程, 王涛龙, 余建刚, 冀鹏飞, 闫施锦, and 梁 庭
- Subjects
SILICON films ,PRESSURE sensors ,SCANNING electron microscopy ,THIN films ,CONFOCAL microscopy - Abstract
Copyright of Piezoelectrics & Acoustooptics is the property of Piezoelectric & Acoustooptic and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
- Published
- 2024
- Full Text
- View/download PDF