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In order to establish a clear relationship between the biological electrical characteristics and biochemical characteristics, an inter-digitated gold electrode was designed and manufactured on a silica glass substrate by using micro-processing technolog. Based on this substrate, a cell electrical measurement device that can measure continuous impedance spectroscopy in real-time was then fabricated. Cervical cancer cell was planted and then growing on the measurement cell. Impedance spectroscopy of the cell was then measured with Parstat4000, with frequency varying from 1 Hz to 1 MHz. Based on existed equivalent circuit model, a corrected model of interdigital electrodes was proposed. The result indicates that the variance of the conrcted model is smaller than the original model. The parameters of corncted model can be devided into two sets which reflect the change of character of the solution and the cells while the cells were growing. Finally, a qualitative relationship between the impedance data and cell physiological change was build. [ABSTRACT FROM AUTHOR]