Search

In many technological applications layered materials have an increasing importance. Almost complete characterization of such materials can be achieved with glancing incidence x-ray analysis (GIXA). Within this technique, x-ray reflectivity and angle-dependent x-ray fluorescence measurements are combined, resulting in a structural and chemical analysis of the samples.

Glancing-incidence x-rays provide a wealth of possibilities for the analysis of thin layers and multilayers. This paper discusses reflectometry under both specular and non-specular conditions, and also the combination with angle-dependent x-ray fluorescence. From these measurements information can be obtained on layer thickness, interface quality and compositional depth profile. First the historical development of glancing-incidence x-ray analysis is sketched. Then the physical principles of the interaction of glancing-incidence x-rays with samples which may contain rough interfaces are discussed. The equipment, which allows for both x-ray fluorescence and reflectivity measurements, is also described. The possibilities are illustrated with a number of examples from the literature.

The accuracy of Fundamental Parameter-based XRF quantification is investigated for both bulk and multilayer analysis. It is found that for bulk materials the relative accuracy is of the order of 1% and for multilayers a few percent. The method can be set up in such a way that it contains an inherent validity check. Further possibilities of the Fundamental Parameter method are discussed.