1. Vacuum seal for a rectangular flange
- Author
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Saeki, Hiroshi, Ego, Hiroyasu, Watanabe, Takahiro, Ishibashi, Katsuya, Satoh, Takafumi, and Miyamoto, Kazuo
- Subjects
- *
VACUUM technology , *METALS , *ULTRAHIGH vacuum , *ELECTRIC discharges , *FLANGES , *SEALING (Technology) - Abstract
Abstract: A new vacuum seal for a rectangular flange used in r.f. equipments, was developed. The vacuum seal consists of a recess with a flat surface, machined into a rectangular flange, a rectangular metal gasket with a raised projection on one face, and a mating flange with a recess and raised projection. No leak greater than 1 × 10−10 Pa m3/s was found in leak tests, before and after baking cycles (100 °C, 12 h). [Copyright &y& Elsevier]
- Published
- 2011
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