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Multilayered substrates for Surface Acoustic Wave (SAW) devices are able to combine SAW characteristics that cannot coexist in a single crystal substrate and, thus, meet the strong requirements of the new class of SAW devices developed for the next generations of communication systems. Recently, high performance resonators arranged on LiTaO3/quartz bonded wafers and utilizing shear horizontally polarized acoustic waves were reported. Leaky SAWs with quasi-longitudinal polarization propagate faster and can facilitate fabrication of high frequency SAW devices but generally leak strongly into the substrate. This paper describes how the LiTaO3/quartz structure can be optimized to allow longitudinal SAWs to propagate without attenuation. Due to the symmetry consideration, which is supplemented by a rigorous numerical simulation of the admittance functions of SAW resonators and an accurate extraction of the propagation losses, the found optimal LiTaO3 and quartz orientations with the optimized LiTaO3 thickness ensure the propagation of acoustic waves with a velocity exceeding 5400 m/s and an electromechanical coupling of 6.8% in resonators with Q factors up to 10,000. The optimal LT/quartz structures with plate thicknesses varying between 0.32 and 0.68 wavelengths can be employed in SAW resonators operating at high frequencies, up to 5 GHz. The existence of numerous orientations in quartz supporting the propagation of non-attenuated longitudinal SAWs is explained based on the concept of exceptional bulk waves, which is a part of SAW theory.

Multilayered substrates, including thin plates of LiTaO3 (LT) bonded to silicon (Si) or glass wafers either directly or via intermediate layers, were numerically investigated as potential materials for surface acoustic wave (SAW) resonators with high quality (Q)-factor required for the next generation of mobile communication systems. The propagation velocities and electromechanical coupling coefficients of shear horizontally (SH) polarized acoustic waves were estimated as functions of LT orientation and thicknesses of all layers in LT/Si, LT/SiO2/Si, LT/glass, LT/AlN/glass and structures with several pairs of SiO2/AlN layers between LT and the glass wafer. Optimal combinations of cut angle, LT and electrode thicknesses, as well as the number and thicknesses of intermediate layers, required for the construction of resonators with improved performance were observed for each analyzed structure. In the resonators employing LT/Si and LT/SiO2/Si structures with 30°YX - 48°YX LT cuts, high electromechanical coupling k2, reaching 11.6%, can be combined with high velocities up to 4000 m/s, zero TCF at the resonant frequency and Q-factors that are considerably higher than in the LSAW filters using regular LT substrates. To understand the loss mechanisms that limit resonator Q-factors in LT/glass, mechanical displacements that accompany wave propagation in multilayered structures were visualized. Investigation of the nature of acoustic modes and their transformations with number and thicknesses of the layers revealed that the low-velocity glass wafer can be used as a supporting substrate if an intermediate AlN layer or alternating pairs of low- and high-velocity layers, for example SiO2/AlN, are introduced between LT and the glass wafer.

Multilayered substrates for Surface Acoustic Wave (SAW) devices are able to combine SAW characteristics that cannot coexist in a single crystal substrate and, thus, meet the strong requirements of the new class of SAW devices developed for the next generations of communication systems. Recently, high performance resonators arranged on LiTaO

The formalism of planar diffraction tensor was applied to the analysis of anisotropy of bulk acoustic wave diffraction and to build a full map of anisotropic diffractional coefficients for three bulk acoustic wave modes propagating in lithium niobate. For arbitrary propagation direction the diffractional coefficients derived allow estimation of ultrasonic beam divergence in far-field. Analysis of obtained data revealed that the maxima of acousto-optic figure of merit for anisotropic diffraction in the YZ plane correspond to moderate diffractional spreading of the beams exceeding isotropic diffraction 2-3 times.

Multilayered substrates, including thin plates of LiTaO