5 results on '"Zhao, Dewen"'
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2. Influence of anisotropy on material removal and deformation mechanism based on nanoscratch tests of monocrystal silicon
3. Undeformed chip width non-uniformity modeling and surface roughness prediction in wafer self-rotational grinding process
4. Comparative study of the lubricating behavior between 12-in. copper disk and wafer during chemical mechanical polishing
5. Wafer bending/orientation characterization and their effects on fluid lubrication during chemical mechanical polishing
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