Author: "Yang, L.Y." / Journal: thin solid films - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yang, L.Y."' showing total 4 results

Start Over Author "Yang, L.Y." Journal thin solid films

4 results on '"Yang, L.Y."'

1. Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration

Author: Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Lu, P.W., Foo, P.D., and Wee, A.T.S.
Published: 2006
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2. Ta/SiCN bilayer barrier for Cu–ultra low k integration

Author: Zhang, D.H., Yang, L.Y., Li, C.Y., Lu, P.W., and Foo, P.D.
Published: 2006
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3. Characterization of Cu/Ta/ultra low- k porous polymer structures for multilevel interconnects

Author: Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., and Foo, P.D.
Published: 2004
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4. Comparative study of Ta, TaN and Ta/TaN bi-layer barriers for Cu-ultra low- k porous polymer integration

Author: Yang, L.Y., Zhang, D.H., Li, C.Y., and Foo, P.D.
Published: 2004
Full Text: View/download PDF

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