7 results on '"Yamaguchi, Tomuo"'
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2. Surface etching effects of amorphous C:H and CN x:H films formed by supermagnetron plasma for field emission use
3. Sputter-assisted plasma CVD of wide or narrow optical bandgap amorphous CNx:H films using i-C4H10/N2 supermagnetron plasma
4. Surface etching effects of amorphous C:H and CN :H films formed by supermagnetron plasma for field emission use
5. Spectroellipsometric characterization of SIMOX with nanometre-thick top Si layers
6. Spectroellipsometric characterization of thin silicon nitride films
7. Properties of heavily phosphorous-doped μc-Si deposited by mesh attached cathode-type r.f. glow discharge
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