Author: "Wei, T.C." / Journal: thin solid films - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Wei, T.C." Journal thin solid films

2 results on '"Wei, T.C."'

1. Comparative and integrative study of Langmuir probe and optical emission spectroscopy in a variable magnetic field electron cyclotron resonance chemical vapor deposition process used for depositing hydrogenated amorphous silicon thin films

Author: Hu, L.C., Ruan, G.M., Wei, T.C., Wang, C.J., Lin, Y.W., Lee, C.C., Kawai, Y., and Li, Tomi T.
Published: 2014
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2. Optical emission spectroscopy as a process control tool during plasma enhanced chemical vapor deposition of microcrystalline silicon thin films

Author: Du, C.C., Wei, T.C., Chang, C.H., Lee, S.L., Liang, M.W., Huang, J.R., Wu, C.H., Shirakura, A., Morisawa, R., and Suzuki, T.
Published: 2012
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