Author: "Wang, Yu-Sheng" / Journal: thin solid films - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Wang, Yu-Sheng"' showing total 6 results

Start Over Author "Wang, Yu-Sheng" Journal thin solid films

6 results on '"Wang, Yu-Sheng"'

1. Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaning

Author: Wei, Kuo-Hsiu, Hung, Chi-Cheng, Wang, Yu-Sheng, Liu, Chuan-Pu, Chen, Kei-Wei, and Wang, Ying-Lang
Published: 2016
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2. An electroplating method for copper plane twin boundary manufacturing

Author: Wang, Yu-Sheng, Lee, Wen-Hsi, Chang, Shih-Chieh, Nian, Jun-Nan, and Wang, Ying-Lang
Published: 2013
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3. Effects of (002) β-Ta barrier on copper chemical mechanical polishing behavior

Author: Wang, Yu-Sheng, Chen, Kei-Wei, Cheng, Min-Yuan, Lee, Wen-Hsi, and Wang, Ying-Lang
Published: 2013
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4. Accelerated resistive humidity sensing properties of silicon nanoporous pillar array

Author: Jiang, Wei Fen, Jia, Min, Wang, Yu Sheng, Li, Long Yu, and Li, Xin Jian
Published: 2009
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5. Under-layer behavior study of low resistance Ta/TaN x barrier film

Author: Wang, Yu-Sheng, Hung, Chi-Cheng, Lee, Wen-Hsi, Chang, Shih-Chieh, and Wang, Ying-Lang
Published: 2008
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6. Under-layer behavior study of low resistance Ta/TaNx barrier film

Author: Wang, Yu-Sheng, primary, Hung, Chi-Cheng, additional, Lee, Wen-Hsi, additional, Chang, Shih-Chieh, additional, and Wang, Ying-Lang, additional
Published: 2008
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