Author: "Blaszczyk-Lezak, I." / Journal: thin solid films - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Blaszczyk-Lezak, I."' showing total 2 results

Start Over Author "Blaszczyk-Lezak, I." Journal thin solid films

2 results on '"Blaszczyk-Lezak, I."'

1. Remote nitrogen microwave plasma chemical vapor deposition from a tetramethyldisilazane precursor. 2. Properties of deposited silicon carbonitride films

Author: Blaszczyk-Lezak, I., Wrobel, A.M., and Bielinski, D.M.
Published: 2006
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2. Remote nitrogen microwave plasma chemical vapor deposition from a tetramethyldisilazane precursor. 1. Growth mechanism, structure, and surface morphology of silicon carbonitride films

Author: Blaszczyk-Lezak, I., Wrobel, A.M., Aoki, T., Nakanishi, Y., Kucinska, I., and Tracz, A.
Published: 2006
Full Text: View/download PDF

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