1. PBr3Adsorption and Dissociation on the Si(100) Surface
- Author
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Shevlyuga, Vladimir M., Vorontsova, Yulia A., and Pavlova, Tatiana V.
- Abstract
The adsorption of PBr3on the Si(100)-2 × 1 surface was studied by scanning tunneling microscopy (STM) and density functional theory (DFT). The PBr3molecule completely dissociates on the Si(100) surface at room temperature into P and Br atoms. In most cases, the dissociated molecule was observed in STM on three neighboring Si dimers. DFT calculations confirm that the PBr3molecule can completely dissociate at room temperature. After annealing the sample to 400 °C, phosphorus is incorporated into silicon, as evidenced by the Si atoms ejected to the surface. These findings are useful for the insertion of individual phosphorus atoms into silicon by PBr3adsorption through a halogen mask.
- Published
- 2023
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