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The feasibility of producing high-quality films of the high-temperature superconducting material YBa[sub 2]Cu[sub 3]O[sub 7-δ] with thicknesses up to 2.6 μm by dc magnetron sputtering is demonstrated. It is found that inclusions consisting of CuO and YBa[sub 2]Cu[sub 3]O[sub 8] coexist with the growing film and are“sinks” for defects, nonstoichiometric atoms, and mechanical stresses. X-ray diffraction and Rutherford backscattering studies show that the structural perfection of the films increases as the thickness is increased in the proposed production regime. © 1999 American Institute of Physics. [ABSTRACT FROM AUTHOR]

The possibility is demonstrated of preparing high-quality films of the high-temperature superconductor YBa[sub 2]Cu[sub 3]C[sub 7-δ] with thicknesses up to 2.6 μm by dc magnetron sputtering. It is found that inclusions consisting of CuO and YBa[sub 2]Cu[sub 3]O[sub 8] coexist with the growing film and are “sinks” for defects, nonstoichiometric atoms, and mechanical stresses. Using x-ray diffraction and Rutherford backscattering, we find that the structural perfection of the films is improved by increasing the thickness when using the proposed fabrication technique. © 1999 American Institute of Physics. [ABSTRACT FROM AUTHOR]