1. High pressure d.c. sputtering of high Tc superconducting films: properties and deposition conditions
- Author
-
H.-J. Frenck, A. Geerkens, and K. Fülber
- Subjects
Superconductivity ,Materials science ,Analytical chemistry ,Mineralogy ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,Condensed Matter Physics ,Evaporation (deposition) ,Surfaces, Coatings and Films ,Sputtering ,Physical vapor deposition ,Materials Chemistry ,Deposition (phase transition) ,Cuprate ,Thin film - Abstract
We used high pressure d.c. sputtering to deposit superconducting thin films (YBa 2 Cu 3 O 7 − δ (YBCO) and Bi 2 Sr 2 CaCu 2 O 8 + x ). With a.c. susceptibility measurements one can not only quickly characterize the superconducting properties of the sample, but also identify the layered growth of the films. Measurements of the gas phase composition of the sputter deposition show an unexpectedly high oxygen/metal ratio. The reason for this ratio is investigated. Measurements of the evaporation of YBCO target material yield spectra are presented, where the most important metal and metal-oxygen species are identified.
- Published
- 1995
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