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Abstract Coating oxidation performance is a major concern in modern machining and other high temperature applications. This study presents TiAlCrN composite coatings with different Cr content prepared on a magnetron sputtering device. SEM, AFM and XRD were used to determine the structure of the coatings. It was found that the coatings show a solid solution of B1-NaCl face-centered cubic structure with [200] preferential orientation. As the Cr content increases, the particle size and roughness of the coating increase slightly, while the hardness of the coating decreases. Oxidation tests revealed that no significant oxidation occurs in all coatings below 800 °C. However, as the oxidation temperature increases to 1000 °C, the Ti 0.32 Al 0.38 Cr 0.30 N coating undergoes severe oxidation and the Ti 0.17 Al 0.19 Cr 0.64 N coating remains good. The oxide scale of the coatings after oxidation test is analysis by XPS depth profiling in details. XPS results revealed that the oxide scale of the Ti 0.32 Al 0.38 Cr 0.30 N coating changes from a dense Al rich oxide layer (800 °C) to a loose and discontinuous Ti Al rich oxide layer (1000 °C), which is the main reason for its poor oxidation resistance. However, the Ti 0.17 Al 0.19 Cr 0.64 N coating shows a top loose Ti Al rich oxide layer and a dense bottom Cr Al rich oxide layer. The presence of this dense and continuous Cr Al rich oxide layer can limit the rapid diffusion of Ti atoms to the surface while preventing the oxygen atoms from diffusing into the interior, which is the key to excellent oxidation resistance of the Ti 0.17 Al 0.19 Cr 0.64 N coatings. Highlights • The oxide scale of TiAlCrN coating was characterized by XPS depth profiling. • As the chromium content increases, the oxidation resistance of the TiAlCrN coating increases. • The excellent oxidation resistance strongly depended on the compact Cr Al rich oxide layer. • The presence of the Cr Al rich oxide layer can limit the rapid diffusion of Ti atoms to the surface. [ABSTRACT FROM AUTHOR]

High surface quality coatings play an important role in producing high precision coating tools for micromachining. This study focuses on the improvement of the coating surface quality by layered design method. The layered TiAlTaN/Ta coatings have been prepared by magnetron sputtering. SEM and AFM results revealed that the continuous growth of the columnar TiAlTaN crystals can be interrupted by layered design. The columnar crystal size of TiAlTaN coating decreased with the decreasing bilayer thickness. The coating surface roughness also gradually decreased from 36.6 ± 1.2 to 11.54 ± 0.6 to 8.9 ± 0.1 nm. Nanoidentation results showed an increasing coating hardness from 16 GPa to 20 GPa with decreasing bilayer thickness. Friction and wear test revealed that the coating friction coefficient increases from 0.70 to 0.93, then decreases to 0.62 with decreasing bilayer thickness. The layered method can improve mechanical and friction properties, meanwhile reducing surface roughness, which makes it a potentially promising method for fabricating high precision micromachining coating tools. [ABSTRACT FROM AUTHOR]

(CrNbTiAlV)N x high-entropy nitride films were prepared using magnetron sputtering method. The effect of substrate bias on the microstructure, mechanical, electrochemical, and tribo-corrosion properties of the films was systematically studied. The results show that the microstructure of the film changes from a loose columnar structure to a compact nanocrystal structure with the increase of substrate bias, accompanied by the preferred orientation from (200) to (111). The hardness, modulus and residual stress are positively correlated with increased substrate bias, reaching the maximum values of 35.3 GPa, 353.7 GPa and −6.41 GPa at −156 V, respectively. Under static corrosion, the film deposited under −126 V has the most positive E corr of −0.05 V and the lowest i corr of 0.013 μA/cm2. Under tribo-corrosion, the films deposited at −96 V and −126 V show the lowest coefficient of friction (~0.2) and wear rate (~4.4 × 10−7 mm3·N−1·m−1), respectively. The evolution of microstructure and mechanical property are the main factors affecting the tribo-corrosion behavior of (CrNbTiAlV)N x films. [Display omitted] • (CrNbTiAlV)N x high-entropy films were deposited at various substrate bias by magnetron sputtering. • The structure of the films changed from loose columnar to compact with the increase of substrate bias. • The hardness, modulus and residual stress of the films were positively correlated with increasing bias. • The influencing factors of (CrNbTiAlV)N x films under static corrosion and dynamic tribocorrosion were discussed. [ABSTRACT FROM AUTHOR]