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Abstract Coating oxidation performance is a major concern in modern machining and other high temperature applications. This study presents TiAlCrN composite coatings with different Cr content prepared on a magnetron sputtering device. SEM, AFM and XRD were used to determine the structure of the coatings. It was found that the coatings show a solid solution of B1-NaCl face-centered cubic structure with [200] preferential orientation. As the Cr content increases, the particle size and roughness of the coating increase slightly, while the hardness of the coating decreases. Oxidation tests revealed that no significant oxidation occurs in all coatings below 800 °C. However, as the oxidation temperature increases to 1000 °C, the Ti 0.32 Al 0.38 Cr 0.30 N coating undergoes severe oxidation and the Ti 0.17 Al 0.19 Cr 0.64 N coating remains good. The oxide scale of the coatings after oxidation test is analysis by XPS depth profiling in details. XPS results revealed that the oxide scale of the Ti 0.32 Al 0.38 Cr 0.30 N coating changes from a dense Al rich oxide layer (800 °C) to a loose and discontinuous Ti Al rich oxide layer (1000 °C), which is the main reason for its poor oxidation resistance. However, the Ti 0.17 Al 0.19 Cr 0.64 N coating shows a top loose Ti Al rich oxide layer and a dense bottom Cr Al rich oxide layer. The presence of this dense and continuous Cr Al rich oxide layer can limit the rapid diffusion of Ti atoms to the surface while preventing the oxygen atoms from diffusing into the interior, which is the key to excellent oxidation resistance of the Ti 0.17 Al 0.19 Cr 0.64 N coatings. Highlights • The oxide scale of TiAlCrN coating was characterized by XPS depth profiling. • As the chromium content increases, the oxidation resistance of the TiAlCrN coating increases. • The excellent oxidation resistance strongly depended on the compact Cr Al rich oxide layer. • The presence of the Cr Al rich oxide layer can limit the rapid diffusion of Ti atoms to the surface. [ABSTRACT FROM AUTHOR]