1. Infrared emission of radio-frequency-excited (N2 + SiH4) discharge by high-resolution Fourier transform spectroscopy
- Author
-
Guy Guelachvili, Mohammed Elhanine, and R. Farrenq
- Subjects
Infrared ,Chemistry ,business.industry ,Infrared spectroscopy ,Pulse sequence ,Fourier transform spectroscopy ,symbols.namesake ,Optics ,Fourier transform ,symbols ,Radio frequency ,Fourier transform infrared spectroscopy ,Atomic physics ,business ,Spectroscopy - Abstract
Infrared emission of a gas mixture of N2 and SiH4 activated by radio frequency discharge has been analyzed using high resolution Fourier transform information. In addition to the several electronic bands of N2, signatures of three transient species--namely, NH, SiN and SiNH--have already been identified. For iminosilicon SiNH this is the first gas phase spectroscopic observation. Molecular parameters have been derived with a high accuracy. For nitride silicon, radical new A2$PI - X2(Sigma) bands have been observed. These data have been combined with other available information in order to improve molecular structure.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
- Published
- 1992
- Full Text
- View/download PDF