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1. In-situ growth of Y1Ba<formula><roman>2</roman></formula>Cu<formula><roman>3</roman></formula>O<formula><roman>7-x</roman></formula> thin films using XeCl excimer and Nd:YAG lasers

Author

Marc Sentis, Vladimir I. Marine, M. Gerri, Yves Mathey, Bernard L. Fontaine, Philippe Ch. Delaporte, and B. M. Forestier

Subjects
Materials science, Laser ablation, Zirconium dioxide, Analytical chemistry, Substrate (electronics), Excimer, Laser, Pulsed laser deposition, law.invention, chemistry.chemical_compound, chemistry, law, Thin film, Yttria-stabilized zirconia
Abstract

Thin films of Y1Ba2Cu3O7-x were deposited via pulsed laser ablation onto MgO and YSZ (Yttria-Stabilized Zirconia) substrates. The use of an IR Nd:YAG laser leads to nonstoichiometric deposition. The best quality superconducting films were deposited by means of UV excimer laser ablation ((lambda) equals 308 nm). These films were strongly orientated with c-axis perpendicular to (100) substrate. The film quality was found to be strongly dependent on substrate temperature, oxygen pressure, sample cooling rate and laser fluence. The deposition process was characterized by the time-resolved spectroscopic measurements of the emission from YO molecules.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Published
1991
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