1. A new type of dynamic infrared image modulator based on the MEMS technique
- Author
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Chunfei Li, Yingxue Shi, Fangkui Sun, Di Wu, Shoutao Zhang, and Wei Jiang
- Subjects
Microelectromechanical systems ,Infrared image ,Engineering ,Fabrication ,business.industry ,Optical engineering ,Electrical engineering ,Process (computing) ,Type (model theory) ,law.invention ,law ,Key (cryptography) ,Electronic engineering ,Resistor ,business - Abstract
In this paper, we have proposed a new type of DIRIM with suspended membrane resistor (SMR) structure, while mainly focusing on its implementation technology which includes selection of resistance material and fabrication technique of the membrane; design of Read-In-Integrated-Circuit; and implementation of silica-base MEMS process. Some performance parameters of the device are quoted to conclude the advantages of this new type of DIRIM and make an outlook on the key development in the future.© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
- Published
- 2007