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Start Over Author "Gravey, V." Journal solid-state electronics
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1. Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques

Author

Redolfi, A., primary, Kubicek, S., additional, Rooyackers, R., additional, Kim, M.-S., additional, Sleeckx, E., additional, Devriendt, K., additional, Shamiryan, D., additional, Vandeweyer, T., additional, Delande, T., additional, Horiguchi, N., additional, Togo, M., additional, Wouters, J.M.D., additional, Jurczak, M., additional, Hoffmann, T., additional, Cockburn, A., additional, Gravey, V., additional, and Diehl, D.L., additional

Published
2012
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