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Developing long-lasting humidity sensors is essential for sustainable advancements in nanotechnology. Prolonged exposure to high humidity can cause sensors to drift from their calibration points, leading to long-term accuracy issues. Our research aims to develop a fabrication method that produces stable sensors capable of withstanding the environmental challenges faced by humidity sensors. Traditional iron-based nanoparticles often require complex treatments, such as chemical modification or thermal annealing, to maintain their properties. This study introduces a novel, one-step synthesis method for iron-based thin films with exceptional stability. The synthesized films were thoroughly characterized using X-ray photoelectron spectroscopy (XPS) to evaluate their phase stability and nitride formation. The method proposed in this study employs an electrical sparking discharge process within a pure nitrogen atmosphere under a 0.2 T magnetic field, producing thin films composed of nanoparticles approximately 20 nm in size. The resulting films demonstrate superior performance in humidity sensing applications compared to conventional methods. This straightforward and efficient approach offers a promising path toward robust and sustainable humidity sensors.

This manuscript presents the use of three novel technologies for the implementation of wireless green battery-less sensors that can be used in agriculture. The three technologies, namely, additive manufacturing, energy harvesting, and wireless power transfer from airborne transmitters carried from UAVs, are considered for smart agriculture applications, and their combined use is demonstrated in a case study experiment. Additive manufacturing is exploited for the implementation of both RFID-based sensors and passive sensors based on humidity-sensitive materials. A number of energy-harvesting systems at UHF and ISM frequencies are presented, which are in the position to power platforms of wireless sensors, including humidity and temperature IC sensors used as agriculture sensors. Finally, in order to provide wireless energy to the soil-based sensors with energy harvesting features, wireless power transfer (WPT) from UAV carried transmitters is utilized. The use of these technologies can facilitate the extensive use and exploitation of battery-less wireless sensors, which are environmentally friendly and, thus, "green". Additionally, it can potentially drive precision agriculture in the next era through the implementation of a vast network of wireless green sensors which can collect and communicate data to airborne readers so as to support, the Artificial Intelligence and Machine Learning-based decision-making with data.

The performance, stability, and lifespan of lithium-ion batteries are influenced by variations in the flow of lithium ions with temperature. In electric vehicles, coolants are generally used to maintain the optimal temperature of the battery, leading to an increasing demand for temperature and humidity sensors that can prevent leakage and short circuits. In this study, humidity and temperature sensors were fabricated on a pouch film of a pouch-type battery. IDE electrodes were screen-printed on the pouch film and humidity- and temperature-sensing materials were printed using a dispenser process. Changes in the capacitance of the printed Ag-CNF film were used for humidity sensing, while changes in the resistance of the printed PEDOT:PSS film were used for temperature sensing. The two sensors were integrated into a single electrode for performance evaluation. The integrated sensor exhibited a response of ΔR ≈ 0.14 to temperature variations from 20 °C to 100 °C with 20% RH humidity as a reference, and a response of ΔC ≈ 2.8 to relative humidity changes from 20% RH to 80% RH at 20 °C. The fabricated integrated sensor is expected to contribute to efficient temperature and humidity monitoring applications in various pouch-type lithium-ion batteries.

Respiratory rate and skin humidity are important physiological signals and have become an important basis for disease diagnosis, and they can be monitored by humidity sensors. However, it is difficult to employ high-quality humidity sensors on a broad scale due to their high cost and complex fabrication. Here, we propose a reliable, convenient, and efficient method to mass-produce humidity sensors. A capacitive humidity sensor is obtained by ablating a polyimide (PI) film with a picosecond laser to produce an interdigital electrode (IDE), followed by drop-casting graphene oxide (GO) as a moisture-sensitive material on the electrode. The sensor has long-time stability, a wide relative humidity (RH) detection range from 10% to 90%, and high sensitivity (3862 pF/%RH). In comparison to previous methods, the technology avoids the complex procedures and expensive costs of conventional interdigital electrode preparation. Furthermore, we discuss the effects of the electrode gap size and the amount of graphene oxide on humidity sensor performance, analyze the humidity sensing mechanism by impedance spectrum, and finally perform the monitoring of human respiratory rate and skin humidity change in a non-contact manner.

Fast humidity sensors are of interest due to their potential application in new sensing technologies such as wearable personal healthcare and environment sensing devices. However, the realization of rapid response/recovery humidity sensors remains challenging primarily due to the sluggish adsorption/desorption of water molecules, which particularly impacts the response/recovery times. Moreover, another key factor for fast humidity sensing, namely the attainment of equal response and recovery times, has often been neglected. Herein, the layer-by-layer (LbL) assembly of a reduced graphene oxide (rGO)/polyelectrolyte is demonstrated for application in fast humidity sensors. The resulting sensors exhibit fast response and recovery times of 0.75 and 0.85 s (corresponding to times per RH range of 0.24 and 0.27 s RH -1 , respectively), providing a difference of only 0.1 s (corresponding to 0.03 s RH -1 ). This performance exceeds that of the majority of previously reported graphene oxide (GO)- or rGO-based humidity sensors. In addition, the polyelectrolyte deposition time is shown to be key to controlling the humidity sensing kinetics. The as-developed rapid sensing system is expected to provide useful guidance for the tailorable design of fast humidity sensors.

Chipless radio-frequency identification (RFID) sensors are not yet widespread in practical applications because of their limited sensitivity and selectivity when compared to more mature sensing technologies. The search for a suitable material to perform the sensing function has often been focused on the most common materials used in electrochemical sensing approaches, but little work has been done to directly relate the performances of chipless or microwave sensors to the characteristics of the materials used to fabricate them. In this work we are simulating the impact of the substrate material on the performances of a chipless RFID sensor for humidity detection. The dielectric parameters of the substrate material turn out to be very important to maximize the sensor performances, in relation to the operative range of the sensor (based on the desired application) and to the effective dielectric properties of the sensitive material used, we verify the simulated results with measurements of real chipless humidity cells with Nafion 117 sensitive material. We show which types of substrate are preferable for low-humidity detection and which substrates' features are instead fundamental to operate in a wider humidity range.

The effects of annealing temperature on the structural, physical and humidity sensing properties of stoichiometric Mg 0.5 W 0.5 Fe 2 O 4 spinel ferrite are investigated. In order to highlight the influence of sintering temperature on the structural, magnetic and electrical properties, ferrite samples were sintered for 2 h at 850 °C, 900 °C, 950 °C, 1000 °C and 1050 °C and the physical properties and humidity influence on magnesium-tungsten ferrite materials were analyzed. X-ray diffraction investigations confirmed the formation of magnesium-tungsten ferrite in the analyzed samples. SEM micrographs revealed the influence of annealing temperature on the microstructures of the samples and provided information related to their porosity and crystallite shape and size. This material, treated at different temperatures, is used as an active element in the construction of capacitive and resistive humidity sensors, whose characteristics were also investigated in order to determine the most suitable sintering temperature.

The role of humidity sensors in different industries and field applications, such as agriculture, food monitoring, biomedical equipment, heating, and ventilation, is well known. However, most commercially available humidity sensors are based on polymers or electronic materials that are not degradable and thus contribute to electronic waste. Here, we report a low-cost, flexible, easy-to-fabricate, and eco-friendly parallel-plate capacitive humidity sensor for field applications. The sensor is fabricated from copper tape and tissue paper, where copper tape is used to create the plates of the capacitor, and tissue paper is used as a dielectric sensing layer. Along with the low cost, the high sensitivity, better response and recovery times, stability, and repeatability make this sensor unique. The sensor was tested for relative humidity (RH), ranging from 40% to 99%, and the capacitance varied linearly with RH from 240 pF to 720 pF, as measured by an Arduino. The response time of the sensor is ~1.5 s, and the recovery time is ~2.2 s. The experiment was performed 4-5 times on the same sensor, and repeatable results were achieved with an accuracy of ±0.1%. Furthermore, the sensor exhibits a stable response when tested at different temperatures. Due to the above advantages, the presented sensor can find ready applications in different areas.

Graphene is a new type of carbon material with a flexible, two-dimensional structure. Due to the excellent stability of its lattice structure and its mechanical flexibility, graphene-based materials can be applied in flexible humidity sensors. At present, the application of graphene-based flexible humidity sensors in the fields of medical care and environmental monitoring is attracting widespread attention. In this review, the basic properties of graphene oxide (GO) and reduced graphene oxide (rGO) as moisture-sensitive materials and methods for their preparation were introduced. Moreover, three methods for improving the performance of moisture-sensitive materials were discussed. The working principle of different types of graphene-based humidity sensors were introduced. The progress in the research on graphene-based flexible humidity sensors in four respects: Human respiration, skin moisture, human sweat, and environmental humidity were discussed. Finally, the future research, following the development trends and challenges, to develop the potential of integrated, graphene-based flexible humidity sensors were discussed.

The calibration points for sensors must be selected carefully. This study uses accuracy and precision as the criteria to evaluate the required numbers of calibration points required. Two types of electric relative humidity (RH) sensors were used to illustrate the method and the standard RH environments were maintained using different saturated salt solutions. The best calibration equation is determined according to the t -value for the highest-order parameter and using the residual plots. Then, the estimated standard errors for the regression equation are used to determine the accuracy of the sensors. The combined uncertainties from the calibration equations for different calibration points for the different saturated salt solutions were then used to evaluate the precision of the sensors. The accuracy of the calibration equations is 0.8% RH for a resistive humidity sensor using 7 calibration points and 0.7% RH for a capacitance humidity sensor using 5 calibration points. The precision is less than 1.0% RH for a resistive sensor and less than 0.9% RH for a capacitive sensor. The method that this study proposed for the selection of calibration points can be applied to other sensors., Competing Interests: The authors declare no conflict of interest.

Humidity measurement is an important technique for the agricultural, foods, pharmaceuticals, and chemical industries. For the sake of convenience, electrical relative humidity (RH) sensors have been widely used. These sensors need to be calibrated to ensure their accuracy and the uncertainty measurement of these sensors has become a major concern. In this study, a self-made divided-flow generator was established to calibrate two types of electrical humidity sensors. The standard reference humidity was calculated from dew-point temperature and air dry-bulb temperature measured by a chilled mirror monitor. This divided-flow generator could produce consistent result of RH measurement results. The uncertainty of the reference standard increased with the increase of RH values. The combined uncertainty with the adequate calibration equations were ranged from 0.82% to 1.45% RH for resistive humidity sensors and 0.63% to 1.4% for capacitive humidity sensors, respectively. This self-made, divided-flow generator, and calibration method are cheap, time-saving, and easy to be used. Thus, the proposed approach can easily be applied in research laboratories., Competing Interests: The authors declare no conflict of interest.

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO₂ nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO₂ nanoparticles as sensing material on the top of the electrodes. The current against voltage (I-V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature.

The development of micro-/nano-scaled energy harvesters and the self-powered sensor system has attracted great attention due to the miniaturization and integration of the micro-device. In this work, lead-free NaNbO₃ piezoelectric nanofibers with a monoclinic perovskite structure were synthesized by the far-field electrospinning method. The flexible active humidity sensors were fabricated by transferring the nanofibers from silicon to a soft polymer substrate. The sensors exhibited outstanding piezoelectric energy-harvesting performance with output voltage up to 2 V during the vibration process. The output voltage generated by the NaNbO₃ sensors exhibited a negative correlation with the environmental humidity varying from 5% to 80%, where the peak-to-peak value of the output voltage generated by the sensors decreased from 0.40 to 0.07 V. The sensor also exhibited a short response time, good selectively against ethanol steam, and great temperature stability. The piezoelectric active humidity sensing property could be attributed to the increased leakage current in the NaNbO₃ nanofibers, which was generated due to proton hopping among the H₃O⁺ groups in the absorbed H₂O layers under the driving force of the piezoelectric potential.

A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH2O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH2O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06±0.005 (Ω/°C) and 0.033 pF/%RH, respectively.

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C.

Nano-structured carbon nitride (CN x ) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the deposited films showed a C=N stretching bandin the range of 1600~1700 ㎝⁻1, depending on the amount of nitrogen incorporation. Thecarbon nitride films deposited on the Si substrate had a nano-structured surfacemorphology with a grain size of about 20 nm, and their deposition rate was 1.5 μm/hr. Thesynthesized films had a high electrical resistivity in the range of 10⁸ to 10⁸ ω·cm,depending on the deposition conditions. The micro humidity sensors showed a goodlinearity and low hysteresis between 5 ~ 95 %RH.