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In this paper, a complementary split-ring resonator (CSRR)-based patch antenna is proposed as a microwave sensor to measure the salt concentration of NaCl solution. The microwave sensor consists of an RF-4 substrate, where a small copper disc is attached on the top as the radiator, a larger copper disc integrated with two CSRRs is attached on the bottom side as the finite ground plane, and a coaxial feeding port is introduced at the ground plane center. During salt concentration sensing, only the top disc is immersed into NaCl solution. The results indicate that the proposed microwave sensor can measure salt concentrations ranging from 5‰ to 35‰ with a maximum sensitivity of 0.367 (kHz/(mg/L)). The proposed microwave sensor is low-cost, low-profile, electrically small, lightweight, and easy to fabricate, and it also can be applied to other solutions' concentration sensing. [ABSTRACT FROM AUTHOR]

This paper briefly overviews and discusses the existing techniques using antennas for passive sensing, starting from the antenna operating principle and antenna structural design to different antenna-based sensing mechanisms. The effects of different electrical properties of the material used to design an antenna, such as conductivity, loss tangent, and resistivity, are discussed to illustrate the fundamental sensing mechanisms. Furthermore, the key parameters, such as operating frequency and antenna impedance, along with the factors affecting the sensing performance, are discussed. Overall, passive sensing using an antenna is mainly achieved by altering the reflected wave characteristics in terms of center frequency, return loss, phase, and received/reflected signal strength. The advantages and drawbacks of each technique are also discussed briefly. Given the increasing relevance, millimeter-wave antenna sensors and resonator sensors are also discussed with their applications and recent advancements. This paper primarily focuses on microstrip-based radiating structures and insights for further sensing performance improvement using passive antennas, which are outlined in this study. In addition, suggestions are made for the current scientific and technical challenges, and future directions are discussed. [ABSTRACT FROM AUTHOR]

Laser and molecular detection techniques that have been used to overcome the limitations of fluorescent DNA labeling have presented new challenges. To address some of these challenges, we developed a DNA laser that uses a solid-state silica microsphere as a ring resonator and a site for DNA-binding reactions, as well as a platform to detect and sequence target DNA molecules. We detected target DNA using laser emission from a DNA-labeling dye and a developed solid-state silica microsphere ring resonator. The microsphere was sensitive; a single base mismatch in the DNA resulted in the absence of an optical signal. As each individual microsphere can be utilized as a parallel DNA analysis chamber, this optical digital detection scheme allows for high-throughput and rapid analysis. More importantly, the solid-state DNA laser is free from deformation, which guarantees stable lasing characteristics, and can be manipulated freely outside the solution. Thus, this promising advanced DNA laser scheme can be implemented on platforms other than optofluidic chips. [ABSTRACT FROM AUTHOR]

The research on MEMS wireless sensing technology adapted to strong power frequency electromagnetic field environments is of great significance to our energy security, economic society, and even national security. Here, we propose a subwavelength cross-meandering resonator (0.49λ0 × 0.49λ0) to simultaneously achieve power frequency electromagnetic field shielding and wireless communication signal transmission. The element size of the resonator is only λ0/11, which is much smaller than that of previous works. In the resonator, a resonance mode with the significant near-field enhancement effect (about 180 times that at f = 1 GHz) is supported. Based on the self-made shielding box experimental setup, the measured shielding effectiveness of the resonator sample can reach more than 33 dB. Moreover, by integrating the cross-meandering resonator with the MEMS sensor, a wireless communication signal can be successfully transmitted. A dual-function cross-meandering resonator integrated with sensors may find potential applications in many military and civilian industries associated with strong power frequency electromagnetic fields. [ABSTRACT FROM AUTHOR]

A THz-to-IR converter can be an effective solution for the detection of low-IR-signature targets by combining the advantages of mature IR detection mechanisms with high atmospheric transmittance in the THz region. A metallic metasurface (MS)-based absorber with linear polarization dependence based on a split-ring resonator (SRR) unit cell has been previously studied as a preliminary example of a THz-to-IR converter structure in the literature. In this simulation-based study, a new cross-shaped unit cell-based metallic MS absorber structure sensitive to dual polarization is designed to eliminate linear polarization dependency, thereby allowing for incoherent detection of THz radiation. A model is developed to calculate the temperature difference and the response time for this new cross-shaped absorber structure, and its performance is compared to the SRR structure for both coherent and incoherent illumination. This model allows for understanding the efficiency of these structures by considering all loss mechanisms which previously had not been considered. It is found that both structures show similar performance under linearly polarized coherent illumination. However, under incoherent illumination, the IR emittance efficiency as gauged by the temperature difference for the cross-shaped structure is found to be twice as high as compared to the SRR structure. The results also imply that calculated temperature differences for both structures under coherent and incoherent illumination are well above the limit of the minimum resolvable temperature difference of the state-of-the-art IR cameras. Therefore, dual-polarized or multi-polarization-sensitive MS absorber structures can be crucial for developing cost-effective THz-to-IR converters and be implemented in THz imaging solutions. [ABSTRACT FROM AUTHOR]

In order to perform complex manipulation and grasp tasks, robotic hands require sensors that can handle increasingly demanding functionality and degrees of freedom. This research paper proposes a radiofrequency sensor that uses a wireless connection between a probe and a tag. A compact and low-profile antenna is mounted on the hand and functions as a probe to read a printed passive resonator on the plastic object being targeted, operating within a pre-touch sensing range. The grasping strategy consists of four stages that involve planar alignment in up-to-down and left-to-right directions between the probe and tag, the search for an appropriate distance from the object, and rotational (angular) alignment. The real and imaginary components of the probe-input impedance are analyzed for different orientation strategies and positioning between the resonator on the object and the probe. These data are used to deduce the orientation of the hand relative to the target object and to determine the optimal position for grasping. [ABSTRACT FROM AUTHOR]

In preceding research endeavors, the frequency characteristics of a ring resonator on surface acoustic waves made of various materials were studied. Investigations encompassed fixation techniques within the housing, the impact of external variables on these components, and the most efficient configuration of the interdigital transducer within the ring resonator to curtail bandwidth. This current study is dedicated to investigating the correlation between sensitivity and the highest measurable acceleration concerning the dimensions of these sensitive elements. Furthermore, it involves assessing the attributes of produced experimental samples to verify the simulation results. The results obtained represent the possibility of creating a micromechanical accelerometer that can be used in the automotive industry as a g-sensor shock, as well as in industries where the numerical value of high overloads is required. [ABSTRACT FROM AUTHOR]

In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator geometry and transduction. In proper FEA or analytical modeling, the explicit description and accurate values of the effective mass and stiffness of the resonator structure are needed. Therefore, here we outlined an analytical model approach to calculate those values using the first principles of kinetic and potential energy analyses. The natural frequencies of the structure were then calculated using those parameters and compared with those that were simulated using the FEA tool ANSYS. Dynamic analysis was performed to calculate the pull-in voltage, shift of resonance frequency, and harmonic analyses of the ring to understand how the ring resonator is affected by the applied voltage. Additional analysis was performed for different orientations of silicon and assessing the frequency response and frequency shifts. The prototype was fabricated using the standard silicon-on-insulator (SOI)-based MEMS fabrication process and the experimental results for resonances showed good agreement with the developed model approach. The model approach presented in this paper can be used to provide valuable insights for the optimization of MEMS resonators for various operating conditions. [ABSTRACT FROM AUTHOR]

The accuracy of the signal within a driving chain for the rate-integrating hemispherical resonator gyro (RI-HRG) plays a crucial role in the overall performance of the gyro. In this paper, a notable and effective method is proposed to realize the identification and compensation of the unbalanced error in the driving chain for the RI-HRG that improved the performance of the multi-loop control applied in the RI-HRG. Firstly, the assembly inclination and eccentricity error of the hemispherical resonator, the inconsistent metal conductive film layer resistance error of the resonator, the coupling error of the driving chain, and the parameter inconsistency error of the circuit components were considered, and the impact of these errors on the multi-loop control applied in the RI-HRG were analyzed. On this basis, the impact was further summarized as the unbalanced error in the driving chain, which included the unbalanced gain error, equivalent misalignment angle, and unbalanced equivalent misalignment angle error. Then, a model between the unbalanced error in the driving chain and a non-ideal precession angular rate was established, which was applicable to both single channel asynchronous control and dual channel synchronous control of the RI-HRG. Further, an unbalanced error identification and compensation method is proposed by utilizing the RI-HRG output with the virtual precession control. Finally, the effectiveness of the proposed method was verified through simulation and experiments in kind. After error compensation, the zero-bias instability of the RI-HRG was improved from 3.0950°/h to 0.0511°/h. The results of experiments in kind demonstrated that the proposed method can effectively suppress the non-ideal angular rate output caused by the unbalanced error in the driving chain for the RI-HRG, thereby further improving the overall performance of the RI-HRG. [ABSTRACT FROM AUTHOR]

This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective coupling stiffness between the modes can be precisely controlled down to near-zero values. This allows the sensitivity of mode localization sensing to be tuned over a wide range. An order of magnitude enhancement in sensitivity is experimentally achieved by reducing the coupling stiffness towards zero. The resonator's simple single-mass structure offers advantages over conventional coupled resonator designs for compact, tunable mode localization sensors. Both positive and negative values of coupling stiffness are demonstrated, enabling maximum sensitivity at the point where coupling crosses through zero. A method for decomposing overlapping resonance peaks is introduced to accurately measure the amplitude ratios of the localized modes even at high sensitivities. The electrostatic tuning approach provides a new option for realizing variable sensitivity mode localization devices using a simplified resonator geometry. [ABSTRACT FROM AUTHOR]

We demonstrated, for the first time, micro-ring resonator assisted photothermal spectroscopy measurement of a gas phase sample. The experiment used a telecoms wavelength probe laser that was coupled to a silicon nitride photonic integrated circuit using a fibre array. We excited the photothermal effect in the water vapor above the micro-ring using a 1395 nm diode laser. We measured the 1f and 2f wavelength modulation response versus excitation laser wavelength and verified the power scaling behaviour of the signal. [ABSTRACT FROM AUTHOR]

Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs. [ABSTRACT FROM AUTHOR]

A high-sensitivity silicon microring (Si MRR) optical biosensor for detecting the nucleocapsid protein of SARS-CoV-2 is proposed and demonstrated. In the proposed biosensor, the surface of a Si MRR waveguide is modified with antibodies, and the target protein is detected by measuring a resonant wavelength shift of the MRR caused by the selective adsorption of the protein to the surface of the waveguide. A Si MRR is fabricated on a silicon-on-insulator substrate using a CMOS-compatible fabrication process. The quality factor of the MRR is approximately 20,000. The resonant wavelength shift of the MRR and the detection limit for the environmental refractive index change are evaluated to be 89 nm/refractive index unit (RIU) and 10−4 RIU, respectively. The sensing characteristics are examined using a polydimethylsiloxane flow channel after the surface of the Si MRR waveguide is modified with the IgG antibodies through the Si-tagged protein. First, the selective detection of the protein by the MRR sensor is experimentally demonstrated by the detection of bovine serum albumin and human serum albumin. Next, various concentrations of nucleocapsid protein solutions are measured by the MRR, in which the waveguide surface is modified with the IgG antibodies through the Si-tagged protein. Although the experimental results are very preliminary, they show that the proposed sensor has a potential nucleocapsid sensitivity in the order of 10 pg/mL, which is comparable to the sensitivity of current antigen tests. The detection time is less than 10 min, which is much shorter than those of other antigen tests. [ABSTRACT FROM AUTHOR]

Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as their response can be altered by undesirable ambient factors, such as temperature and humidity variations. In this work we propose a method to discriminate humidity variations from the general frequency response using an SMR specifically manufactured to operate in a dual-mode (displaying two close resonances). The two modes behave similarly towards humidity changes (−1.94 kHZ/(%RH)) for resonance one and −1.62 kHZ/(%RH) for resonance two), whereas their performance under temperature changes is significantly different, displaying 2.64 kHZ/°C for resonance one and 34.21 kHZ/°C for resonance two. This allows for the decoupling process to be carried out in a straightforward manner. Frequency response is tracked under different humidity conditions, in the −20 °C to room temperature region, proving that this behavior is reproducible in any given environment. [ABSTRACT FROM AUTHOR]

Metallic nanoscale particles attract a growing interest in several fields, thanks to their unique bonding characteristics; applications are appearing in the literature in the fields of, for example, sensor coatings and biochemical compound detection. However, the controlled fabrication of such nanopowders is often cumbersome, especially because their characterization is normally slow, involving procedures such as electron microscopy. On the other hand, microwave sensors based on near-field effects on materials are being developed with high sensitivity and show promising characteristics. In this paper, the authors show how a microwave sensor based on a Square Spiral Resonator can be used to characterize paraffin dispersions of nanoparticles conveniently and cost-effectively. [ABSTRACT FROM AUTHOR]

The properties of small size, low noise, high performance and no wear-out have made the hemispherical resonator gyroscope a good choice for high-value space missions. To enhance the precision of the hemispherical resonator gyroscope for use in tasks with large angular velocities and angular accelerations, this paper investigates the standing wave precession of a non-ideal hemispherical resonator under nonlinear high-intensity dynamic conditions. Based on the thin shell theory of elasticity, a dynamic model of a hemispherical resonator is established by using Lagrange's second kind equation. Then, the dynamic model is equivalently transformed into a simple harmonic vibration model of a point mass in two-dimensional space, which is analyzed using a method of averaging that separates the slow variables from the fast variables. The results reveal that taking the nonlinear terms about the square of the angular velocity and the angular acceleration in the dynamic equation into account can weaken the influence of the 4th harmonic component of a mass defect on standing wave drift, and the extent of this weakening effect varies with the dimensions of the mass defects, which is very important for steering the development of the high-precision hemispherical resonator gyroscope. [ABSTRACT FROM AUTHOR]

We propose and study a nanoscale strong coupling effect between metamaterials and polymer molecular vibrations using metallic split-ring resonators (SRRs). Specifically, we first provided a numerical investigation of the SRR design, which was followed by an experimental demonstration of strong coupling between mid-infrared magnetic dipole resonance supported by the SRRs fabricated on a calcium fluoride substrate and polymethyl methacrylate molecular vibrations at 1730 cm−1. Characterized by the anti-crossing feature and spectral splitting behaviors in the transmission spectra, these results demonstrate efficient nanoscale manipulation of light–matter interactions between phonon vibrations and metamaterials. [ABSTRACT FROM AUTHOR]

This work focuses on demonstrating the working principle of inkjet-printed Au nanoparticle (NP) two-layer Gigahertz (2.6 GHz) microwave split-ring resonators (SRRs) as a novel platform for the detection of analytes on flexible substrates. In contrast to the standard fabrication of split-ring resonator biosensors using printed circuit board technology, which results in a seven-layer system, the resonators in this work were fabricated using a two-layer system. A ground plane is embedded in the SRR measurement setup. In this method, a microwave electromagnetic wave is coupled into the Au SRR via an inkjet-printed Cu-NP stripline that is photonically sintered. This coupling mechanism facilitates the detection of analytes by inducing resonance shifts in the SRR. In this study, the functionality of the printed sensors was demonstrated using two different Au functionalization processes, firstly, with HS-PEG7500-COOH, and, secondly, with protein G with an N-terminal cysteine residue. The sensing capabilities of the printed structures are shown by the attachment of biomolecules to the SRR and the measurement of the resulting resonance shift. The experiments show a clear shift of the resonance frequency in the range of 20–30 MHz for both approaches. These results demonstrate the functionality of the simplified printed two-layer microwave split-ring resonator for use as a biosensor. [ABSTRACT FROM AUTHOR]

The remarkable light perception abilities of the mantis shrimp, which span a broad spectrum ranging from 300 nm to 720 nm and include the detection of polarized light, serve as the inspiration for our exploration. Drawing insights from the mantis shrimp's unique visual system, we propose the design of a multifunctional imaging sensor capable of concurrently detecting spectrum and polarization across a wide waveband. This sensor is able to show spectral imaging capability through the utilization of a 16-channel multi-waveband Fabry–Pérot (FP) resonator filter array. The design incorporates a composite thin film structure comprising metal and dielectric layers as the reflector of the resonant cavity. The resulting metal–dielectric composite film FP resonator extends the operating bandwidth to cover both visible and infrared regions, specifically spanning a broader range from 450 nm to 900 nm. Furthermore, within this operational bandwidth, the metal–dielectric composite film FP resonator demonstrates an average peak transmittance exceeding 60%, representing a notable improvement over the metallic resonator. Additionally, aluminum-based metallic grating arrays are incorporated beneath the FP filter array to capture polarization information. This innovative approach enables the simultaneous acquisition of spectrum and polarization information using a single sensor device. The outcomes of this research hold promise for advancing the development of high-performance, multifunctional optical sensors, thereby unlocking new possibilities in the field of optical information acquisition. [ABSTRACT FROM AUTHOR]

Bifurcation topology transfer phenomena in the presence of mode localization are investigated using double-ended fixed electrostatically coupled tuning fork resonators. An analytical model is proposed for the coupled tuning fork resonators, and the effects of feedthrough capacitance on the structure are also analyzed and eliminated by means of data post-processing. Then, an open-loop experimental platform is established, when the system is in balance state, the quality factor is obtained under test as Q = 9858, and comparison of the experiment with numerical simulation results is in good agreement. Finally, with the voltage increases, the two resonators gradually exhibit nonlinear characteristics. It is worth noting that when one of the coupled resonators exhibits nonlinear vibration behavior, even though the vibration amplitude of the other resonator is lower than the critical amplitude, it still exhibits nonlinear behavior, and the results confirm the existence of the bifurcation topology transfer phenomenon in coupled resonators' mode localization phenomenon. [ABSTRACT FROM AUTHOR]

The performance of a hemispherical resonant gyroscope (HRG) is directly affected by the sphericity error of the thin-walled spherical shell of the hemispherical shell resonator (HSR). In the production process of the HSRs, high-speed, high-accuracy, and high-robustness requirements are necessary for evaluating sphericity errors. We designed a sphericity error evaluation method based on the minimum zone criterion with an adaptive number of subpopulations. The method utilizes the global optimal solution and the subpopulations' optimal solution to guide the search, initializes the subpopulations through clustering, and dynamically eliminates inferior subpopulations. Simulation experiments demonstrate that the algorithm exhibits excellent evaluation accuracy when processing simulation datasets with different sphericity errors, radii, and numbers of sampling points. The uncertainty of the results reached the order of 10−9 mm. When processing up to 6000 simulation datasets, the algorithm's solution deviation from the ideal sphericity error remained around −3 × 10−9 mm. And the sphericity error evaluation was completed within 1 s on average. Additionally, comparison experiments further confirmed the evaluation accuracy of the algorithm. In the HSR sample measurement experiments, our algorithm improved the sphericity error assessment accuracy of the HSR's inner and outer contour sampling datasets by 17% and 4%, compared with the results given by the coordinate measuring machine. The experiment results demonstrated that the algorithm meets the requirements of sphericity error assessment in the manufacturing process of the HSRs and has the potential to be widely used in the future. [ABSTRACT FROM AUTHOR]

Resonators are passive time-invariant components that do not produce a frequency shift. However, they respond to an excitation signal close to resonance with an oscillation at their natural frequencies with exponentially decreasing amplitudes. If resonators are connected to antennas, they form purely passive sensors that can be read remotely. In this work, we model the external excitation of a resonator with different excitation signals and its subsequent decay characteristics analytically as well as numerically. The analytical modeling explains the properties of the resonator during transient response and decay behavior. The analytical modeling clarifies how natural oscillations are generated in a linear time-invariant system, even if their spectrum was not included in the stimulation spectrum. In addition, it enables the readout signals to be optimized in terms of duration and bandwidth. [ABSTRACT FROM AUTHOR]

This study explores the viability of using the avoided mode crossing phenomenon in the microwave regime to design microwave differential sensors. While the design concept can be applied to any type of planar electrically small resonators, here, it is implemented on split-ring resonators (SRRs). We use two coupled synchronous SRRs loaded onto a two-port microstrip line system to demonstrate the avoided mode crossing by varying the distance between the split of the resonators to control the coupling strength. As the coupling becomes stronger, the split in the resonance frequencies of the system increases. Alternatively, by controlling the strength of the coupling by materials under test (MUTs), we utilize the system as a microwave differential sensor. First, the avoided mode crossing is theoretically investigated using the classical microwave coupled resonator techniques. Then, the system is designed and simulated using a 3D full-wave numerical simulation. To validate the concept, a two-port microstrip line, which is magnetically coupled to two synchronous SRRs, is utilized as a sensor, where the inter-resonator coupling is chosen to be electric coupling controlled by the dielectric constant of MUTs. For the experimental validation, the sensor was fabricated using printed circuit board technology. Two solid slabs with dielectric constants of 2.33 and 9.2 were employed to demonstrate the potential of the system as a novel differential microwave sensor. [ABSTRACT FROM AUTHOR]

The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the "ferroelectric film—substrate" structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate. [ABSTRACT FROM AUTHOR]

We introduced a label-free sensing system based on an array of microring resonators (MRRs) which was successfully employed for human serum albumin (HSA) detection. The sensing-ring surface was functionalized to immobilize anti-HSA, facilitating HSA binding. Our refractive index sensing system demonstrates high sensitivity at 168 nm/RIU and a low limit of detection (LOD) of 63.54 ng/mL, closely comparable to current HSA detection methods. These findings confirm the potential of MRRs as biocompatible sensors for HSA detection. This system holds great promise as an innovative platform for the detection of HSA, carrying significant importance in medical diagnostics. [ABSTRACT FROM AUTHOR]

Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes. [ABSTRACT FROM AUTHOR]

The engineering of thermo-optic effects has found broad applications in integrated photonic devices, facilitating efficient light manipulation to achieve various functionalities. Here, we perform both an experimental characterization and a theoretical analysis of these effects in integrated microring resonators made from high-index doped silica, which have had many applications in integrated photonics and nonlinear optics. By fitting the experimental results with theory, we obtain fundamental parameters that characterize their thermo-optic performance, including the thermo-optic coefficient, the efficiency of the optically induced thermo-optic process, and the thermal conductivity. The characteristics of these parameters are compared to those of other materials commonly used for integrated photonic platforms, such as silicon, silicon nitride, and silica. These results offer a comprehensive insight into the thermo-optic properties of doped silica-based devices. Understanding these properties is essential for efficiently controlling and engineering them in many practical applications. [ABSTRACT FROM AUTHOR]

In this article, a miniature eight-port multiple-input multiple-output (MIMO) antenna array is proposed for fifth-generation (5G) sub-6 GHz handset applications. The individual antenna element comprises a radiator shaped like the Chinese character "王" (phonetically represented as "Wang") and three split-ring resonators (SRR) on the metal frame. The size of the individual antenna element is only 6.8 × 7 × 1 mm3 (47.6 mm3). The proposed antenna element has a −10 dB impedance bandwidth of 1.7 GHz (from 3.3 GHz to 5 GHz) that can cover 5G New Radio (NR) sub-6 GHz bands N77 (3.3–4.2 GHz), N78 (3.3–3.8 GHz), and N79 (4.4–5 GHz). The evolution design, the current distribution, the effects of single-handed holding, and the analysis of the parameters are deduced to study the approach used to design the featured antenna. The measured total efficiencies are from 40% to 80%, the isolation is better than 12 dB, the calculated envelope correlation coefficient (ECC) is less than 0.12, and the calculated channel capacity (CC) ranges from 35 to 38 bps/Hz. The presented antenna array is a good alternative to 5G mobile handsets with wideband operation, a metal frame, and minimized spacing. [ABSTRACT FROM AUTHOR]

A micro-ring resonator structure was fabricated via the two-photon polymerization technique directly on a single-mode fiber tip and tested for refractive index sensing application. The micro-ring structure was used to excite whispering-gallery modes, and observations of the changes in the resonance spectrum introduced by changes in the refractive index of the environment served as the sensing principle. The proposed structure has the advantages of a very simple design, allowing for measurements in reflection mode, relatively easy and fast fabrication and integration with a single tip of a standard single-mode fiber, which allowed for quick and convenient measurements in the optical setup. The performance of the structure was characterized, and the resonant spectrum giving high potential for refractive index sensing was measured. Future perspectives of the research are addressed. [ABSTRACT FROM AUTHOR]

The existence of surface plasmon polaritons in doped silicon micro-scale structures has opened up new and innovative possibilities for applications, such as sensing, imaging, and photonics. A CMOS-compatible doped Si plasmonic sensor is proposed and investigated. The plasmon resonance can be tuned by controlling the carrier density and dopant concentration. In this paper, we demonstrate that using silicon doped with phosphorus at a concentration of 5 × 10 20 cm − 3 can induce surface plasmon resonance in the mid-infrared region. Two ring resonators of two different radii based on metal–insulator–metal waveguide structures are studied individually. Then, the two ring resonators are integrated in the same device. When the two ring resonators are coupled and resonate at the same frequency; two distinct resonance spectral lines are generated with striking features that improve its potential use for sensing and modulation applications. The propagating plasmonic mode is studied, including its mode profile and bend loss. We evaluate the effectiveness of a microstructure gas sensor with dimensions of 15 μ m × 15 μ m by measuring its sensitivity and selectivity towards methane and ethane gases. Small alterations in the surrounding refractive index led to noticeable shifts in the resonance peak. The sensor achieved a sensitivity of 7539.9 nm/RIU at the mid-infrared spectral range around the 7.7 μ m wavelength. Furthermore, by combining the resonators, we can achieve a smaller full width at half maximum (FWHM), which will ultimately result in greater sensitivity than using a single-ring resonator or other plasmonic resonator configurations. Once the sensitivity and selectivity of the sensor are measured, the FOM can be calculated by dividing the sensitivity by the selectivity of the sensor, resulting in an FOM of 6732. [ABSTRACT FROM AUTHOR]

This paper presents a novel single-ring resonator design and experimentally demonstrates its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor at its center connected to an outside ring via inner ring-shaped springs. The mode shapes and frequency of the ring resonator were determined numerically and compared with analytical approaches, and the minimum split frequency was observed for the n = 3 mode of vibration. Numerical and analytical methods were used to determine the resonance frequencies, pull-in voltage, resonance frequency shift and harmonic response of the ring resonator for different silicon orientations. The split frequency in the n = 3 mode of vibration increases by the applied DC bias voltage almost by the same amount for all types of silicon. When an AC voltage with a 180-degree phase is applied to two opposite electrodes, the ring has two resonance frequencies in mode n = 2, and when the AC voltage applied to two opposite electrodes is in the same phase, the ring has one resonance frequency regardless of the crystal orientation of silicon. Prototypes were fabricated using a double silicon-on-insulator-based wafer fabrication technique and were tested to verify the resonator performance. [ABSTRACT FROM AUTHOR]

The design of high-performance complementary meta-resonators for microwave sensors featuring high sensitivity and consistent evaluation of dielectric materials is challenging. This paper presents the design and implementation of a novel complementary resonator with high sensitivity for dielectric substrate characterization based on permittivity and thickness. A complementary crossed arrow resonator (CCAR) is proposed and integrated with a fifty-ohm microstrip transmission line. The CCAR's distinct geometry, which consists of crossed arrow-shaped components, allows for the implementation of a resonator with exceptional sensitivity to changes in permittivity and thickness of the material under test (MUT). The CCAR's geometrical parameters are optimized to resonate at 15 GHz. The CCAR sensor's working principle is explained using a lumped-element equivalent circuit. The optimized CCAR sensor is fabricated using an LPKF protolaser on a 0.762-mm thick dielectric substrate AD250C. The MUTs with dielectric permittivity ranging from 2.5 to 10.2 and thickness ranging from 0.5 mm to 1.9 mm are used to investigate the properties and calibrate the proposed CCAR sensor. A two-dimensional calibration surface is developed using an inverse regression modelling approach to ensure precise and reliable measurements. The proposed CCAR sensor is distinguished by its high sensitivity of 5.74%, low fabrication cost, and enhanced performance compared to state-of-the-art designs, making it a versatile instrument for dielectric characterization. [ABSTRACT FROM AUTHOR]

The field of flexible electronics is undergoing an exponential evolution due to the demand of the industry for wearable devices, wireless communication devices and networks, healthcare sensing devices and the technology around the Internet of Things (IoT) framework. E-tex tiles are attracting attention from within the healthcare areas, amongst others, for providing the possibility of developing continuous patient monitoring solutions and customized devices to accommodate each patient's specific needs. This review paper summarizes multiple approaches investigated in the literature for wearable/flexible resonators working as antenna-based systems, sensors and filters with special attention paid to the integration to flexible materials, especially textiles. This review manuscript provides a general overview of the flexible resonators' advantages and drawbacks, materials, fabrication techniques and processes and applications. Finally, the main challenges and future prospects of wearable resonators are discussed. [ABSTRACT FROM AUTHOR]

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing. [ABSTRACT FROM AUTHOR]

Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed–fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co1-xFex)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron–cobalt–hafnium alloy (Fe0.5Co0.5)0.92Hf0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed. [ABSTRACT FROM AUTHOR]

Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design. [ABSTRACT FROM AUTHOR]

Compared with lever-type amplification mechanisms, bridge-type flexible amplification mechanisms have advantages in terms of amplification ratio and structural compactness. Therefore, they can effectively replace the lever-type amplification mechanism in the existing hair-like sensors and realize the development of miniature hair-like sensors with high sensitivity. With that in mind, a highly sensitive hair-like sensor based on a bridge-type amplification mechanism with distributed flexibility is presented to measure the airflow rate. First, the structural composition and operating principle of the hair-like sensor are described. Then, detailed design and analysis of the hair-like sensor are carried out, focusing on the design of the hair post structure, amplification mechanism, and resonator. Furthermore, the designed hair-like sensor is processed and prepared, and some experimental studies are conducted. The experimental results demonstrate that the developed hair-like sensor can measure the airflow rate with high sensitivity up to 8.56 Hz/(m/s)2. This provides a new concept for the structural design of hair-like sensors and expands the application of bridge-type flexible amplification mechanisms in the field of micro/nano sensors. [ABSTRACT FROM AUTHOR]

This study introduces a monopole 4 × 4 Ultra-Wide-Band (UWB) Multiple-Input Multiple-Output (MIMO) antenna system with a novel structure and outstanding performance. The proposed design has triple-notched characteristics due to CSRR etching and a C-shaped curve. The notching occurs in 4.5 GHz, 5.5 GHz, and 8.8 GHz frequencies in the C-band, WLAN band, and satellite network, respectively. Complementary Split-Ring Resonators (CSRR) are etched at the feed line and ground plane, and a C-shaped curve is used to reduce interference between the ultra-wide band and narrowband. The mutual coupling of CSRR enables the MIMO architecture to achieve high isolation and polarisation diversity. With prototype dimensions of (60.4 × 60.4) mm2, the proposed antenna design is small. The simulated and measured results show good agreement, indicating the effectiveness of the UWB-MIMO antenna for wireless communication and portable systems. [ABSTRACT FROM AUTHOR]

Planar sub-wavelength resonators have been used for sensing applications, but different types of resonators have different advantages and disadvantages. The split ring resonator (SRR) has a smaller sensing region and is suitable for microfluidic applications, but the sensitivity can be limited. Meanwhile, the complementary electric-LC resonator (CELCR) has a larger sensing region and higher sensitivity, but the topology cannot be easily designed to reduce the sensing region. In this work, we propose a new design that combines the advantages of both SRR and CELCR by incorporating metallic bars in a trapezoid-shaped resonator (TSR). The trapezoid shape allows for the sensing region to be reduced, while the metallic bars enhance the electric field in the sensing region, resulting in higher sensitivity. Numerical simulations were used to design and evaluate the sensor. For validation, the sensor was fabricated using PCB technology with aluminum bars and tested on dielectric fluids. The results showed that the proposed sensor provides appreciably enhanced sensitivity in comparison to earlier sensors. [ABSTRACT FROM AUTHOR]

New designs based on S0 Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO2, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO2 cap layer, or structured SiO2 elements, showing their performance in the usual terms of electromechanical coupling coefficient (K2), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO2 capping. The addition of a thin diamond layer can also improve the velocity and electromechanical coupling coefficient, while keeping zero TCF and increasing the solidity of the membranes. Beyond the increase in performance allowed by such resonator configurations, their inherent structure shows additional benefits in terms of passivation, which makes them particularly relevant for sensing applications in stern environments. [ABSTRACT FROM AUTHOR]

This paper presents a metasurface-based linear-to-circular polarization converter with a flexible structure for conformal and wearable applications. The converter consists of nested S- and C-shaped split ring resonators in the unit cell and can convert linearly polarized incident waves into left-handed circularly polarized ones at 12.4 GHz. Simulation results show that the proposed design has a high polarization conversion rate and efficiency at the operating frequency. Conformal tests are also conducted to evaluate the performance under curvature circumstances. A minor shift in the operating frequency is observed when the converter is applied on a sinusoidal wavy surface. [ABSTRACT FROM AUTHOR]

We demonstrate an S-shaped double-spiral microresonator (DSR) for detecting small volumes of analytes, such as liquids or gases, penetrating a microfluidic channel. Optical-ring resonators have been applied as label-free and high-sensitivity biosensors by using an evanescent field for sensing the refractive index of analytes. Enlarging the ring resonator size is a solution for amplifying the interactions between the evanescent field and biomolecules to obtain a higher refractive index sensitivity of the attached analytes. However, it requires a large platform of a hundred square millimeters, and 99% of the cavity area would not involve evanescent field sensing. In this report, we demonstrate the novel design of a Si-based S-shaped double-spiral resonator on a silicon-on-insulator substrate for which the cavity size was 41.6 µm × 88.4 µm. The proposed resonator footprint was reduced by 680 times compared to a microring resonator with the same cavity area. The fabricated resonator exposed more sensitive optical characteristics for refractive index biosensing thanks to the enhanced contact interface by a long cavity length of DSR structures. High quality factors of 1.8 × 104 were demonstrated for 1.2 mm length DSR structures, which were more than two times higher than the quality factors of microring resonators. A bulk sensitivity of 1410 nm/RIU was calculated for detecting 1 µL IPA solutions inside a 200 µm wide microchannel by using the DSR cavity, which had more than a 10-fold higher sensitivity than the sensitivity of the microring resonators. A DSR device was also used for the detection of 100 ppm acetone gas inside a closed bottle. [ABSTRACT FROM AUTHOR]

The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector. [ABSTRACT FROM AUTHOR]

Whispering gallery mode resonators have proven to be robust and sensitive platforms for the trace detection of chemical and/or biological analytes. Conventional approaches using serially addressed resonators face challenges in simultaneous multi-channel (i.e., multi-species) detection. We present an alternative monitoring scheme that allows for the spatial multiplexing of whispering gallery mode resonators with the simultaneous observation of the resonance spectra from each of them. By imaging arrays of microspheres and monitoring the glare spot intensities through image processing routines, resonance spectra from multiple resonators may be simultaneously recorded without interference or confounding effects of serial excitation/detection. We demonstrate our multiplexed imaging approach with bulk refractive index variations and virus–antibody binding. [ABSTRACT FROM AUTHOR]

Terahertz (THz) waves, which fall between microwaves and infrared bands, possess intriguing electromagnetic properties of non-ionizing radiation, low photon energy, being highly sensitive to weak resonances, and non-polar material penetrability. Therefore, THz waves are extremely suitable for sensing and detecting chemical, pharmaceutical, and biological molecules. However, the relatively long wavelength of THz waves (30~3000 μm) compared to the size of analytes (1~100 nm for biomolecules, <10 μm for microorganisms) constrains the development of THz-based sensors. To circumvent this problem, metasurface technology, by engineering subwavelength periodic resonators, has gained a great deal of attention to enhance the resonance response of THz waves. Those metasurface-based THz sensors exhibit high sensitivity for label-free sensing, making them appealing for a variety of applications in security, medical applications, and detection. The performance of metasurface-based THz sensors is controlled by geometric structure and material parameters. The operating mechanism is divided into two main categories, passive and active. To have a profound understanding of these metasurface-assisted THz sensing technologies, we review and categorize those THz sensors, based on their operating mechanisms, including resonators for frequency shift sensing, nanogaps for enhanced field confinement, chirality for handedness detection, and active elements (such as graphene and MEMS) for advanced tunable sensing. This comprehensive review can serve as a guideline for future metasurfaces design to assist THz sensing and detection. [ABSTRACT FROM AUTHOR]

A design for a millimeter wave RF probe card that removes resonance is proposed. The designed probe card optimizes the position of the ground surface and the signal pogo pins to resolve the resonance and signal loss issues that occur when connecting a dielectric socket and a PCB. At millimeter wave frequencies, the height of the dielectric socket and pogo pin matches the length of half a wavelength, allowing the socket to act as a resonator. When the leakage signal from the PCB line is coupled to the 2.9 mm high socket with pogo pins, resonance at a frequency of 28 GHz is generated. The probe card uses the ground plane as a shielding structure to minimize this resonance and radiation loss. The importance of the signal pin location is verified via measurements in order to address the discontinuity caused by field polarity switching. A probe card fabricated using the proposed technique exhibits an insertion loss performance of −8 dB up to 50 GHz and eliminates resonance. A signal with an insertion loss of −3.1 dB can be transmitted to a system-on-chip in a practical chip test. [ABSTRACT FROM AUTHOR]

A novel refractive index-based sensor implemented within a silicon photonic integrated circuit (PIC) is reported. The design is based on a double-directional coupler (DC) integrated with a racetrack-type resonator (RR) to enhance the optical response to changes in the near-surface refractive index via the optical Vernier effect. Although this approach can give rise to an extremely large 'envelope' free spectral range (FSRVernier), we restrict the design geometry to ensure this is within the traditional silicon PIC operating wavelength range of 1400–1700 nm. As a result, the exemplar double DC-assisted RR (DCARR) device demonstrated here, with FSRVernier = 246 nm, has a spectral sensitivity SVernier = 5 × 104 nm/RIU. [ABSTRACT FROM AUTHOR]

The permittivity of a material is an important parameter to characterize the degree of polarization of a material and identify components and impurities. This paper presents a non-invasive measurement technique to characterize materials in terms of their permittivity based on a modified metamaterial unit-cell sensor. The sensor consists of a complementary split-ring resonator (C-SRR), but its fringe electric field is contained with a conductive shield to intensify the normal component of the electric field. It is shown that by tightly electromagnetically coupling opposite sides of the unit-cell sensor to the input/output microstrip feedlines, two distinct resonant modes are excited. Perturbation of the fundamental mode is exploited here for determining the permittivity of materials. The sensitivity of the modified metamaterial unit-cell sensor is enhanced four-fold by using it to construct a tri-composite split-ring resonator (TC-SRR). The measured results confirm that the proposed technique provides an accurate and inexpensive solution to determine the permittivity of materials. [ABSTRACT FROM AUTHOR]

This article proposes the design, fabrication and measurement of a triple-rings complementary split-ring resonator (CSRR) microwave sensor for semi-solid material detection. The triple-rings CSRR sensor was developed based on the CSRR configuration with curve-feed designed together, utilizing a high-frequency structure simulator (HFSS) microwave studio. The designed triple rings CSRR sensor resonates at 2.5 GHz, performs in transmission mode, and senses shift in frequency. Six cases of the sample under tests (SUTs) were simulated and measured. These SUTs are Air (without SUT), Java turmeric, Mango ginger, Black Turmeric, Turmeric, and Di-water, and detailed sensitivity analysis is conducted for the frequency resonant at 2.5 GHz. The semi-solid tested mechanism is undertaken using a polypropylene (PP) tube. The samples of dielectric material are filled into PP tube channels and loaded in the CSRR centre hole. The e-fields near the resonator will affect the interaction with the SUTs. The finalized CSRR triple-rings sensor was incorporated with defective ground structure (DGS) to deliver high-performance characteristics in microstrip circuits, leading to a high Q-factor magnitude. The suggested sensor has a Q-factor of 520 at 2.5 GHz with high sensitivity of about 4.806 and 4.773 for Di-water and Turmeric samples, respectively. The relationship between loss tangent, permittivity, and Q-factor at the resonant frequency has been compared and discussed. These given outcomes make the presented sensor ideal for detecting semi-solid materials. [ABSTRACT FROM AUTHOR]

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of two n = 2 wineglass modes could be realized by optimizing the design parameters of the elliptic spokes. The mode-matched resonator could be obtained when the design parameter, aspect ratio of the elliptic spokes was 25/27. The proposed principle was demonstrated by both numerical simulation and experiment. A frequency mismatch as small as 1330 ± 900 ppm could be experimentally demonstrated, which was much smaller than that of the conventional disk resonator, which achieved as high as 30,000 ppm. [ABSTRACT FROM AUTHOR]