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This paper reports a new approach for the direct calculations of the pull-in parameters of electrostatic actuators using a lumped two degrees of freedom (L2DOF) pull-in model. This model benefits from higher accuracy than the lumped single degree of freedom (L1DOF) models. Moreover, it requires much shorter calculation time compared to either finite-differences simulations or the coupled-domain finite-elements (FEM)/boundary-elements (BEM) simulations. Therefore, this model provides a fast and accurate tool for design optimization of micromachined devices with two-coupled DOF that employ the pull-in phenomenon. In order to confirm the model results, several case studies are compared with either finite-differences simulations or coupled-domains FEM/BEM simulations provided by MEMCAD4.8™, showing an excellent agreement. [Copyright &y& Elsevier]

In this paper a quantitative model for the effect of residual charges, located in dielectric coating layers, upon the pull-in parameters of electrostatic actuators is presented. Applying voltages higher than the pull-in voltage across the electrodes of an electrostatic actuator results in the collapse of the movable electrode of the actuator on the fixed one. In order to avoid short circuit, one or both of the electrodes can be coated by a dielectric isolating layer. Residual charges can accumulate in this dielectric coating and affect the behavior, and more specifically the pull-in parameters, of the electrostatic actuator. The model derived in this paper considers a general electrostatic actuator with a general charge distribution in the dielectric coating. The main interesting new results derived from the model are: (i) the pull-in displacement is unaffected by the residual charge and the travel range is only extended due to the series dielectric capacitor, (ii) the pull-in voltage is significantly reduced due to the residual charge, independent of the residual charge polarity and distribution. [Copyright &y& Elsevier]