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1. Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications

Author

Lijie Li and Zhuming Liu

Subjects
temperature characteristics, coplanar waveguide, biosensors, Chemical technology, TP1-1185
Abstract

In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.

Published
2011
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2. Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications

Author

Zhuming Liu and Lijie Li

Subjects
Materials science, Fabrication, coplanar waveguide, Dielectric, Thermal transfer, Biosensing Techniques, lcsh:Chemical technology, Biochemistry, Article, Analytical Chemistry, temperature characteristics, Electricity, Computer Simulation, lcsh:TP1-1185, Electrical and Electronic Engineering, Microwaves, Instrumentation, Microelectromechanical systems, business.industry, Coplanar waveguide, Electrical engineering, Temperature, Equipment Design, Models, Theoretical, biosensors, Atomic and Molecular Physics, and Optics, Finite element method, Microscopy, Electron, Scanning, Optoelectronics, Microtechnology, business, Microwave, Voltage
Abstract

In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.

Published
2011

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