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A gecko foot-inspired, mushroom-shaped artificial dry adhesive exploiting intermolecular forces between microstructure and surface has drawn research attention for its strong adhesive force. However, the high pull-off strength corresponding to the adhesive force matters when detaching fragile substrates. In this study, we report a vacuum-powered soft actuator having oblique air chambers and a dry adhesive. The soft actuator performs coupled contraction and twisting by applying negative pneumatic pressure inward and exhibits not only high pull-off strength but also easy detachment. This effective detachment can be achieved thanks to the twisting motion of the soft actuator. The detachment performances of the actuator models are assessed using a 6-degrees-of-freedom robot arm. Results show that the soft actuators exhibit remarkable pull-off strength decrement from ~20 N cm−2 to ~2 N cm−2 due to the twisting. Finally, to verify a feasible application of this study, we utilize the inherent compliance of the actuators and introduce a glass transfer system for which a glass substrate on a slope is gripped by the flexibility of the soft actuators and delivered to the destination without any fracture. Vacuum-powered soft actuator with oblique air chambers for easy detachment of artificial dry adhesive by coupled contraction and twisting In this work, we report a vacuum-powered soft actuator with artificial dry adhesive. We used a vacuum for the easy detachment of the dry adhesive and verified a feasibility for the real-industrial fields. The highlights and novelty of this work are as follows: • Vacuum-powered soft actuator with Gecko inspired dry adhesive • High adhesion with an easy detachment by twisting motion • Mechanical analysis of the easy detachment • Novel glass transfer system with the 6-DOF robot arm based on the soft actuator [ABSTRACT FROM AUTHOR]