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A method is introduced to measure friction on small, free standing objects, specifically microfabricated silicon plates, based on atomic force microscopy (AFM). An AFM tip is brought into contact with the plate resting on a substrate. The substrate is displaced laterally and, provided the AFM tip does not slide over the plate, the twisting of the AFM cantilever is used to measure the friction of the underlying plate-substrate interface. The method can measure nano-Newton to micro-Newton forces (both friction and applied load) and provides a means to measure friction of macroscopic structures at low load.

A cantilever has been microfabricated for use in non-contact Atomic Force Microscopy (AFM) using a very thick magnetic film to actuate the cantilever motion. The thick magnetic block is deposited electrochemically over a defined area of the cantilever. This cantilever is particularly suitable for driving stiff AFM cantilevers in a liquid environment. Clean mechanical resonances are easily observed. Examples are given of a hard (CoPt) magnet of dimension 29 × 21 × 6 μm(3) electroplated on Silicon cantilevers of stiffness ~22 N/m, giving a static displacement of ~0.2 nm in an applied field of 10(-3) T.