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8 results on '"Wu, Wenbin"'

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1. A miniaturized ECR plasma flood gun for wafer charge neutralization

4. Status of high current H2+ and H3+ ion sources

5. Status of high current H2+ and H3+ ion sources.

8. Possibility of generating H + , or H 2 + , or H 3 + dominated ion beams with a 2.45 GHz permanent magnet ECR ion source.

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