1. Three-dimensional transport imaging for the spatially resolved determination of carrier diffusion length in bulk materials.
- Author
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Blaine, K. E., Phillips, D. J., Frenzen, C. L., Scandrett, C., and Haegel, N. M.
- Subjects
- *
LUMINESCENCE , *ELECTRON microscopes , *CHARGE coupled devices , *IMAGE converters , *INTEGRATED circuits - Abstract
A contact-free optical technique is developed to enable a spatially resolved measurement of minority carrier diffusion length and the associated mobility-lifetime (μτ) product in bulk semiconductor materials. A scanning electron microscope is used in combination with an internal optical microscope and imaging charge-coupled device (CCD) to image the bulk luminescence from minority carrier recombination associated with one-dimensional excess carrier generation. Using a Green's function to model steady-state minority carrier diffusion in a three-dimensional half space, non-linear least squares analysis is then applied to extract values of carrier diffusion length and surface recombination velocity. The approach enables measurement of spatial variations in the μτ product with a high degree of spatial resolution. [ABSTRACT FROM AUTHOR]
- Published
- 2012
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