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We have developed a new atomic force microscope (AFM), with a z scanner independent of the xy scanner. Unlike conventional AFM systems, our xy scanner moves only the sample in the xy plane, while the z scanner controls the AFM probe along the z axis. The xy scanner is a single module parallel-kinematics flexure stage that guarantees high orthogonality and minimum out-of-plane motion. The z scanner is a one-dimensional flexure stage with negligible out-of-axis motion. Separating the z scanner from the xy scanner practically eliminates the x–z cross coupling problem inherent in conventional AFMs. Furthermore, the z servo response is no longer limited by the xy scanner characteristics, allowing us to make full use of our high performance z scanner. Our system uses the laser beam bounce detection method, and only the cantilever and the photodetector are mounted on the z scanner to realize a lightweight probing unit. We have devised a unique design such that the photodetector signal measures only the cantileve...

Dynamic contact mode electrostatic force microscopy (DC-EFM) was developed as a new operation mode of scanning probe microscope (SPM). By operating EFM in a contact mode with an ac modulation bias, we have improved the spatial resolution and also achieved a complete separation of the topographic effect from other electrostatic force effect overcoming the mixing problem of a topographic effect with other electrostatic effects frequently encountered in the conventional noncontact EFM measurement. DC-EFM can be utilized either as a force microscopy for the surface hardness, or as a potentiometry for the surface potential distribution, or as a charge densitometry for the surface charge density study. This is also applicable to the measurement and control of the domain structure in ferroelectric materials that have a bound surface charge.

We report a noninvasive high speed voltage sampling technique by using atomic force microscope. This technique is based on the mixing of interaction forces between a conductive probe-tip and a device interconnect line. Mixing phenomena allow measurements of signals with frequencies far above the mechanical resonance frequency of the cantilever. To increase the sensitivity and stability of the signal detection in ambient environment, we employed a delayed pulse sampling and lock-in amplifier detection of the small electrostatic force resulting from a high frequency signal on integrated circuits. The probing pulse is first modulated by a low frequency sinusoidal voltage using a double-balanced diode mixer. The junction between probe-tip and integrated circuit interconnection line works as the second mixer which mixes the probing voltage with the high speed waveform in the interconnection line. This technique can sense voltage signals even through a passivation layer of a 0.5 μm in thickness. We sampled an 8...

Sidewall surface roughness is an important parameter in electronic device manufacture. At present, no high resolution technique exists to quantitatively characterize this property for undercut structures created by semiconductor processing techniques. We developed a three-dimensional atomic force microscope (3D-AFM) to measure the surface roughness of undercut sidewalls with nanometer precision. Decoupled from the positional scanner, the 3D-AFM probe had a variable tilt up to 40° off the normal. Nonorthogonal scans resolved the sidewall surface roughness, base width, and acute critical angle for undercut structures, including a metal overhang and the transmission line of a photonic device. Compatible with standard cantilevers, the 3D-AFM demonstrates great potential for characterizing the sidewalls of soft materials such as photoresist.

This article describes the design of a scanning tunneling microscope (STM) which is suitable for surface science work. Various concepts in mechanical structure and electronic circuitry of the STM have been pursued to optimize its performance. This STM has been designed especially to meet the requirement of in situ sample preparation and sample transfer in ultrahigh vacuum. The electronics of this STM are capable of taking simultaneous images with opposite polarities of tunneling voltages.

The theories of the feedback and vibration isolation systems have been developed to illuminate the essential points in the design and operation of the scanning tunneling microscope (STM). By analyzing a delay differential equation, we can understand the behavior of feedback and estimate the necessary gain and time constant for the best performance of the STM. Design considerations for a vibration isolation system consisting of spring suspension and magnetic damping are discussed with theoretical optimization.