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Start Over Author "Belmesov, A. A." Journal protection of metals and physical chemistry of surfaces
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2. Corrosion in Solutions of Mineral Acids of Ti–B–N Thin Films Obtained by Reactive Magnetron Sputtering

Author

Nadezhda N. Dremova, A. A. Belmesov, G. V. Kalinnikov, I. I. Korobov, S. P. Shilkin, and A. V. Ivanov

Subjects
Reactive magnetron, Mineral, Materials science, 020209 energy, Organic Chemistry, Metals and Alloys, 02 engineering and technology, 021001 nanoscience & nanotechnology, Titanium nitride, Surfaces, Coatings and Films, Corrosion, Atmosphere, chemistry.chemical_compound, chemistry, Chemical engineering, Sputtering, Cavity magnetron, 0202 electrical engineering, electronic engineering, information engineering, Materials Chemistry, Thin film, 0210 nano-technology
Abstract

The interaction of thin Ti–B–N films obtained by magnetron reactive sputtering of a TiB2 target was studied in an atmosphere of a gas argon–nitrogen mixture (85 vol % Ar + 15 vol % N2), with mineral acids (HCl, H2SO4, H3PO4, HNO3). It was found that the hexagonal boron nitride formed during the deposition process, along with titanium nitride, forms a resistant protective film that protects the bulk (~85%) of the film from corrosion.

Published
2020

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