6 results on '"Zoethout, Erwin"'
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2. Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB.
3. Subatomic accuracy in EUVL multilayer coatings.
4. Stress mitigation in Mo/Si multilayers for EUV lithography.
5. Spectral purity enhancement for the EUV lithography systems by suppressing UV reflection from multilayers
6. Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
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