8 results on '"Zelsmann, M."'
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2. Graphoepitaxy integration and pattern transfer of lamellar silicon-containing high-χ block copolymers.
3. Graphoepitaxy integration and pattern transfer of lamellar silicon-containing high-chi block copolymers
4. Template flatness issue for UV curing nanoimprint lithography.
5. Evaluation of an alternative UV-NIL mold fabrication process.
6. A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers
7. Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures
8. Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes
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