11 results on '"Wang, Chih-Yu"'
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2. Quantification of OPC performance of 150-nm gates using top-down CD-SEM.
3. Reducing CD-SEM measurement carryover effect for 193-nm resist processes using CEq.
4. Autofluoresence spectroscopy for in-vivo diagnosis of human oral carcinogenesis.
5. Investigating inspectability and printability of contamination deposited during SEM analysis.
6. Using pattern quality confirmation to control a metal-level DUV process with a top-down CD-SEM.
7. Innovative techniques for automatic multi-CD-SEM image quality monitoring and matching.
8. Identification of oral carcinogenesis using autofluorescence spectroscopy: an in-vivo study.
9. Photomask CD correlation of an optical linewidth measurement tool and a scanning electron microscope with reference to a Stylus NanoProfilometer.
10. Optical imaging of objects in turbid medium with ultrashort pulses.
11. Imaging of inhomogeneities in turbid media.
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