Author: "Wack, Daniel" / Journal: proceedings of spie - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Wack, Daniel" Journal proceedings of spie

2 results on '"Wack, Daniel"'

1. Dark-field optical scatterometry for line-width-roughness metrology.

Author: Zhuang, G. Vera, Spielman, Steven, Fielden, John, Wack, Daniel C., Poslavsky, Leonid, and Bunday, Benjamin D.
Published: 2009
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2. Opportunities and challenges for optical CD metrology in double patterning process control.

Author: Wack, Daniel C., Hench, John, Poslavsky, Leonid, Fielden, John, Zhuang, Vera, Mieher, Walter, and Dziura, Ted
Published: 2008
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