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We report on a technology for multi-level microstructures manufacturing. Results are presented in the field of multilevel diffractive optical elements (DOEs) fabrication. The DOEs presented as examples are Fresnel lenses and Fourier computer generated holograms, calculated by means of a conventional Iterative Fourier Transform Algorithm. The DOEs have a typical pixel dimension of 5x5 m2and are up to 512 by 512 pixels in size. The fabrication technique is based on polymer laser ablation through a chrome-on-quartz half-tone mask with a demagnifying high NA lens. In our case, the mask is imaged onto the polymer with a 5x, 0.13 NA reduction lens. The experimental results are presented and discussed.