4 results on '"Pereira, Cheryl"'
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2. Optical characterization of multi-NST nanowire test structures using Mueller matrix spectroscopic ellipsometry (MMSE) based scatterometry for sub 5nm nodes
3. Dry-plasma-free chemical etch technique for variability reduction in multi-patterning (Conference Presentation)
4. EPE improvement thru self-alignment via multi-color material integration
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