Author: "Im, Ji Young" / Journal: proceedings of spie - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Im, Ji Young" Journal proceedings of spie

4 results on '"Im, Ji Young"'

1. Design for nanoimprint lithography: Hot spot modification through total NIL process simulation.

Author: Sachiko Kobayashi, Kyoji Yamashita, Hirotaka Tsuda, Kazuhiro Washida, Motofumi Komori, Im Ji-Young, Takuya Kono, and Tetsuro Nakasugi
Published: 2018
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2. Design for nanoimprint lithography: hot spot modification through total NIL process simulation

Author: Panning, Eric M., Sanchez, Martha I., Kobayashi, Sachiko, Yamashita, Kyoji, Tsuda, Hirotaka, Washida, Kazuhiro, Komori, Motofumi, Im, Ji-Young, Kono, Takuya, and Nakasugi, Tetsuro
Published: 2018
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3. RLT uniformity improvement utilizing multi-scale NIL process simulation

Author: Bencher, Christopher, Cheng, Joy Y., Kobayashi, Sachiko, Inanami, Ryoichi, Tsuda, Hirotaka, Washida, Kazuhiro, Komori, Motofumi, Yamashita, Kyoji, Im, Ji-Young, Kono, Takuya, and Maeda, Shimon
Published: 2017
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4. Design for nanoimprint lithography: total layout refinement utilizing NIL process simulation

Author: Bencher, Christopher, Cheng, Joy Y., Kobayashi, Sachiko, Komori, Motofumi, Ryoichi, Inanami, Yamashita, Kyoji, Mimotogi, Akiko, Im, Ji-Young, Hatano, Masayuki, Kono, Takuya, and Maeda, Shimon
Published: 2016
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