1. Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes.
- Author
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Hibst, Nicolas and Strehle, Steffen
- Subjects
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SILICON nanowires synthesis , *ELECTRODES , *SENSOR arrays , *CATALYSTS , *PLATINUM nanowires - Abstract
Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra- and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a preferred electrode material but device fabrication remains a key challenge. In this article, we present a straightforward assembly strategy for directly connected and quasi-vertically aligned silicon nanowires (SiNWs) that could lead to well-defined electrode arrays in future. Our strategy exploits certain features of platinum-catalyzed SiNW growth and simultaneously interlinks the SiNW synthesis and the formation of the electrical contacts using a single metallization film. Our assembly strategy relies fully on conventional photolithography and can cope with various electrode designs and configurations considering single-nanowire electrode readouts. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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