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Abstract: A new 3D shape measurement method based on non-integral twin-frequency grating projection is proposed. In this paper, the projected composite grating is composed of two sinusoidal gratings, and the quotient of whose frequencies is not an integer. By using appropriate phase-shifting algorithms, two wrapped phases can be obtained from sixteen frames of the distorted grating patterns. In aid of appropriate phase unwrapping method, the unwrapped phase of high frequency fringe is obtained only from the relation of the two wrapped phases by a pixel-to-pixel phase unwrapping technique. Therefore the unwrapped phase of high frequency fringe pattern is independent of the low frequency fringe pattern, different from traditional integral twin-frequency grating projection methods in which the phase unwrapping error of low frequency fringe pattern may be propagated onto the unwrapped phase of high frequency fringe pattern. The new theory proves that the proposed method is applicable to measure discontinuous object, and has considerable measurement accuracy. [Copyright &y& Elsevier]

Abstract: A methodology for measuring the telecentricity of illumination system in lithography tool based on the pinhole imaging is proposed. Illumination light goes through the pinhole located on the reticle plane and forms the pupil-fill image in CCD image sensor. Based on the Fresnel diffraction theory, the image intensity of source in CCD photosurface and the optimization of pinhole size are discussed. By simulating, effects of the stability of telecentricity measuring from non-uniformity of light field and pinhole defocus in different illumination patterns are analyzed respectively. Simulation results prove the effectiveness of this new method. [Copyright &y& Elsevier]

Abstract: In this paper, Arnold transformation and double random-phase encoding technique widely used in digital image information hiding are introduced to digital audio information hiding. The digital audio is transformed into a 2-D image called sound map and then the sound map will be divided into many windows and each window will be encrypted based on the Arnold transformation. Finally sound map will be re-encrypted based on double random-phase encoding technique. This method offers many advantages for digital audio information hiding: improve security and high attack immunity. [Copyright &y& Elsevier]