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Start Over Author "Meyrueis, Patrick" Journal optics letters
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3. Iterative scalar nonparaxial algorithm for the design of Fourier phase elements

Author

Andreas Bacher, Philippe Gérard, Pierre Pfeiffer, Peter Jakobs, Giang Nam Nguyen, Meyrueis Patrick, Daniel Häringer, Kevin Heggarty, Département Optique (OPT), Université européenne de Bretagne - European University of Brittany (UEB)-Télécom Bretagne-Institut Mines-Télécom [Paris] (IMT), Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), and Télécom Physique Strasbourg

Subjects
Diffraction, Physics, Lithography, Subwavelength structures, Nanostructure fabrication, business.industry, Iterative method, [SPI.FLUID]Engineering Sciences [physics]/Reactive fluid environment, Paraxial approximation, Scalar (mathematics), Physics::Optics, Propagator, Diffraction efficiency, Atomic and Molecular Physics, and Optics, Wavelength, symbols.namesake, Optics, Fourier transform, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, symbols, Optical design and fabrication, business, Algorithm, Diffractive optics
Abstract

International audience; We propose an iterative algorithm based on our scalar non-paraxial propagator for the design of Fourier Diffractive Optical Elements (DOEs) having features on the order of the illumination wavelength. The simulation results show that our algorithm using iterative Fourier transform and iterative projection obtains higher performance DOEs than a purely scalar paraxial design with the same order of calculation time. Upon verification with the experimental results, we find that our scalar-based design method is valid for DOEs with surprisingly small feature sizes (about half the wavelength) and diffraction angles up to about 37°.

Published
2014

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