1. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
- Author
-
Jennifer Rebellato, Regina Soufli, Franck Delmotte, Evgueni Meltchakov, Eric M. Gullikson, Sébastien de Rossi, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Institut d'Optique Graduate School (IOGS)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Centre National d'Études Spatiales [Toulouse] (CNES), Lawrence Livermore National Laboratory (LLNL), and Lawrence Berkeley National Laboratory [Berkeley] (LBNL)
- Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Materials science ,business.industry ,Attosecond ,Extreme ultraviolet lithography ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Laser ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,law.invention ,010309 optics ,Wavelength ,Optics ,Transmission electron microscopy ,law ,Extreme ultraviolet ,0103 physical sciences ,Nanometre ,Thin film ,0210 nano-technology ,business ,ComputingMilieux_MISCELLANEOUS - Abstract
In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.
- Published
- 2020
- Full Text
- View/download PDF