1. Power-efficient silicon nitride thermo-optic phase shifters for visible light
- Author
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Zheng Yong, Hong Chen, Xianshu Luo, Alperen Govdeli, Hongyao Chua, Saeed S. Azadeh, Andrei Stalmashonak, Guo-Qiang Lo, Joyce K. S. Poon, and Wesley D. Sacher
- Subjects
FOS: Physical sciences ,Applied Physics (physics.app-ph) ,Physics - Applied Physics ,Atomic and Molecular Physics, and Optics ,Optics (physics.optics) ,Physics - Optics - Abstract
We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a $\pi$ phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and $10- 90$\% rise(fall) times of about 570(590) $\mu$s were measured., Comment: Zheng Yong and Hong Chen contributed equally to this work
- Published
- 2022