5 results on '"Nomura, Hiroshi"'
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2. Wide-view-angle λ/4 plates for diagnosing 193-nm lithography tools
3. Measurement of Wave-Front Aberrations in Lithography Lenses with an Overlay Inspection Tool
4. A Novel Technique for Measuring Defocus with Phase Shift Gratings on a Photomask
5. Investigation of High-Precision Lithography Lens Aberration Measurement Based on Three-Beam Interference Theory: Sensitivity versus Coherent Factor and Variations with Dose and Focus
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