12 results on '"Voelskow, M."'
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2. Endotaxial growth of InSb nanocrystals at the bonding interface of the In+ and Sb+ ion implanted SOI structure
3. Nanometer-thick SGOI structures produced by Ge+ ion implantation of SiO2 films and subsequent hydrogen transfer of Si layers
4. Epitaxial 3C-SiC nanocrystal formation at the SiO2/Si interface after carbon implantation and subsequent annealing in CO atmosphere
5. Flash lamp annealing with millisecond pulses for ultra-shallow boron profiles in silicon
6. Theoretical and experimental investigations of defect evolution in silicon carbide during N+ and Al+ ion implantation taking into account internal stress fields
7. The influence of the implantation sequence on the (SiC)1−x(AlN)x formation
8. A novel (SiC)1−x(AlN)x compound synthesized using ion beams
9. Radiation damage and annealing behaviour of Ge+-implanted SiC
10. Ion beam synthesis by tungsten-implantation into 6H-silicon carbide
11. MeV carbon implantation into silicon: microstructure and electrical properties
12. Transient enhanced diffusion and electrical activation of As in Si during rapid thermal annealing
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