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We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm(2) regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are also discussed. Both techniques are shown to successfully enable high-resolution, large area images to be generated at least an order of magnitude faster than with a conventional atomic force microscope.

Understanding the modal response of an atomic force microscope is important for the identification of image artefacts captured using contact-mode atomic force microscopy (AFM). As the scan rate of high speed AFM increases, these modes present themselves as ever clearer noise patterns as the frequency of cantilever vibration falls under the frequency of pixel collection. An Euler-Bernoulli beam equation is used to simulate the flexural modes of the cantilever of an atomic force microscope as it images a hard surface in contact mode. Theoretical results are compared with experimental recordings taken in the high speed regime, as well as previous analytical results. It is shown that the model can capture the mode shapes and resonance properties of the first four eigenmodes.

Using scanning laser Doppler vibrometer we have identified sources of noise in contact mode high-speed atomic force microscope images and the cantilever dynamics that cause them. By analysing reconstructed animations of the entire cantilever passing over various surfaces, we identified higher eigenmode oscillations along the cantilever as the cause of the image artefacts. We demonstrate that these can be removed by monitoring the displacement rather than deflection of the tip of the cantilever. We compare deflection and displacement detection methods whilst imaging a calibration grid at high speed and show the significant advantage of imaging using displacement.